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Restructuring Charges - Restructuring Charges (Details) - USD ($) $ in Thousands	3 Months Ended	9 Months Ended
	Sep. 25, 2021	Sep. 25, 2021
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 4,633	$ 5,267
Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	4,070	4,070
Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	563	1,197
Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	4,322	4,490
Cost of revenues | Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	4,070	4,070
Cost of revenues | Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	252	420
Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	289	694
Research and development | Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	0
Research and development | Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	289	694
Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	22	83
Selling, general and administrative | Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	0
Selling, general and administrative | Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 22	$ 83

X

- Definition

Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section 45
-Paragraph 3
-URI http://asc.fasb.org/extlink&oid=109237686&loc=d3e17752-110868

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SAB Topic 5.P.3)
-URI http://asc.fasb.org/extlink&oid=115931487&loc=d3e140864-122747

Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3602-108585

Reference 4: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SAB Topic 5.P.4(b)(1))
-URI http://asc.fasb.org/extlink&oid=115931487&loc=d3e140904-122747

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+ References

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