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Restructuring Charges - Restructuring Charges (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 24, 2022	Sep. 25, 2021	Sep. 24, 2022	Sep. 25, 2021
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 6,174	$ 4,633	$ 7,068	$ 5,267
Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	6,060	4,322	6,653	4,490
Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	67	289	266	694
Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	47	22	149	83
Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	5,966	4,070	6,235	4,070
Probe Cards | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	5,928	4,070	6,194	4,070
Probe Cards | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	38	0	38	0
Probe Cards | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	0	3	0
Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	208	563	833	1,197
Systems | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	132	252	459	420
Systems | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	29	289	228	694
Systems | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 47	$ 22	$ 146	$ 83

X

- Definition

Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section 45
-Paragraph 3
-URI https://asc.fasb.org/extlink&oid=109237686&loc=d3e17752-110868

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SAB Topic 5.P.3)
-URI https://asc.fasb.org/extlink&oid=115931487&loc=d3e140864-122747

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-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585

Reference 4: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SAB Topic 5.P.4(b)(1))
-URI https://asc.fasb.org/extlink&oid=115931487&loc=d3e140904-122747

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