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Restructuring Charges - Restructuring Charges (Details) - USD ($) $ in Thousands	3 Months Ended
	Apr. 01, 2023	Mar. 26, 2022
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 1,217	$ 313
Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	25	139
Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	70	146
Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	1,122	28
Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	1,134	42
Probe Cards | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	70	39
Probe Cards | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	4	0
Probe Cards | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	1,060	3
Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	83	271
Systems | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	(45)	100
Systems | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	66	146
Systems | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 62	$ 25

X

- Definition

Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section 45
-Paragraph 3
-URI https://asc.fasb.org/extlink&oid=109237686&loc=d3e17752-110868

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SAB Topic 5.P.3)
-URI https://asc.fasb.org/extlink&oid=115931487&loc=d3e140864-122747

Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585

Reference 4: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 420
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SAB Topic 5.P.4(b)(1))
-URI https://asc.fasb.org/extlink&oid=115931487&loc=d3e140904-122747

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+ References

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