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Restructuring Charges - Restructuring Charges (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jul. 01, 2023	Jun. 25, 2022	Jul. 01, 2023	Jun. 25, 2022	Dec. 31, 2022
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 618	$ 581	$ 1,835	$ 894
Accrued restructuring charges	207		207		$ 1,249
Cash payments			(2,281)
Non-cash settlement			(596)
Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	332	454	357	593
Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	221	53	291	199
Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	65	74	1,187	102
Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	223	227	1,357	269
Probe Cards | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	47	227	106	266
Probe Cards | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	170	0	182	0
Probe Cards | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	6	0	1,069	3
Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	395	354	478	625
Systems | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	285	227	251	327
Systems | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	51	53	109	199
Systems | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 59	$ 74	$ 118	$ 99

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Amount of cash payments made as the result of exit or disposal activities. Excludes payments associated with a discontinued operation or an asset retirement obligation.

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