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Restructuring Charges - Restructuring Charges (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 30, 2023	Sep. 24, 2022	Sep. 30, 2023	Sep. 24, 2022	Dec. 31, 2022
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 0	$ 6,174	$ 1,835	$ 7,068
Accrued restructuring charges	29		29		$ 1,249
Cash payments			(2,459)
Non-cash settlement			(596)
Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	6,060	357	6,653
Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	67	291	266
Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	47	1,187	149
Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	5,966	1,357	6,235
Probe Cards | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	5,928	106	6,194
Probe Cards | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	38	182	38
Probe Cards | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	0	1,069	3
Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	208	478	833
Systems | Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	132	251	459
Systems | Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0	29	109	228
Systems | Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 0	$ 47	$ 118	$ 146

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- Definition

Amount of cash payments made as the result of exit or disposal activities. Excludes payments associated with a discontinued operation or an asset retirement obligation.

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Amount of decrease in the reserve for full or partial settlement through consideration other than cash.

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