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Divesture - Fair Value Disclosure (Details) - Disposal Group, Held-for-Sale, Not Discontinued Operations - USD ($) $ in Thousands	Feb. 26, 2024	Feb. 07, 2024	Nov. 01, 2023	Sep. 18, 2023	Oct. 09, 2019
FRT Metrology
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Gross purchase price			$ 99,100	$ 100,000	$ 24,400
Estimated working capital adjustment			4,266
Cash transferred to the buyer at closing			(2,049)
Direct costs to sell			(1,225)
Fair value of sale consideration			$ 100,092
China Operations
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Gross purchase price	$ 25,000	$ 25,000
Estimated working capital adjustment	159
Cash transferred to the buyer at closing	(2,743)
Direct costs to sell	(986)
Fair value of sale consideration	$ 21,430

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Amount of consideration received or receivable for the disposal of assets and liabilities, including discontinued operation.

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