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Note 14 - Income Taxes (Details Textual) - USD ($) $ in Thousands | 3 Months Ended |
--- | --- | ---
Mar. 31, 2023 | Mar. 31, 2022
Capitalized Research and Development Expenses | $ 9,200 |
Deferred Tax Assets, Valuation Allowance | 183,567 | $ 186,618
Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount | (3,100) |
Undistributed Earnings of Foreign Subsidiaries | 1,900 |
Deferred Tax Liability Not Recognized, Amount of Unrecognized Deferred Tax Liability, Undistributed Earnings of Foreign Subsidiaries | 200 |
Liability for Uncertainty in Income Taxes, Current |  | 0
Unrecognized Tax Benefits | 0 | 0
Research Tax Credit Carryforward [Member] |  |
Tax Credit Carryforward, Amount | 11,100 |
Other Tax Credit Carryforwards [Member] |  |
Tax Credit Carryforward, Amount | 3,500 |
Power Quality Systems, Inc [Member] |  |
Operating Loss Carryforwards | 3,500 |
Infinia Technology Corporation (ITC) [Member] |  |
Operating Loss Carryforwards |  | $ 300
Domestic Tax Authority [Member] |  |
Operating Loss Carryforwards | 718,900 |
Operating Loss Carryforwards Indefinite | 101,700 |
State and Local Jurisdiction [Member] |  |
Operating Loss Carryforwards | 204,200 |
Foreign Tax Authority [Member] |  |
Operating Loss Carryforwards | $ 700 |

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