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Note 14 - Income Taxes (Details Textual) - USD ($)
$ in Thousands
 3 Months Ended
Mar. 31, 2023
Mar. 31, 2022
Capitalized Research and Development Expenses $ 9,200  
Deferred Tax Assets, Valuation Allowance 183,567 $ 186,618
Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount (3,100)  
Undistributed Earnings of Foreign Subsidiaries 1,900  
Deferred Tax Liability Not Recognized, Amount of Unrecognized Deferred Tax Liability, Undistributed Earnings of Foreign Subsidiaries 200  
Liability for Uncertainty in Income Taxes, Current   0
Unrecognized Tax Benefits 0 0
Research Tax Credit Carryforward [Member]    
Tax Credit Carryforward, Amount 11,100  
Other Tax Credit Carryforwards [Member]    
Tax Credit Carryforward, Amount 3,500  
Power Quality Systems, Inc [Member]    
Operating Loss Carryforwards 3,500  
Infinia Technology Corporation (ITC) [Member]    
Operating Loss Carryforwards   $ 300
Domestic Tax Authority [Member]    
Operating Loss Carryforwards 718,900  
Operating Loss Carryforwards Indefinite 101,700  
State and Local Jurisdiction [Member]    
Operating Loss Carryforwards 204,200  
Foreign Tax Authority [Member]    
Operating Loss Carryforwards $ 700