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OTHER LONG-TERM LIABILITIES (Details) - USD ($) $ in Thousands | Mar. 31, 2021 | Dec. 31, 2020
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Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | $ 6,639 | $ 8,034
Subsidies to Stress Free Polishing Project, Commenced in 2008 and 2017 [Member] |  |
Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | 1,221 | 1,266
Subsidies to Electro Copper Plating Project, Commenced in 2014 [Member] |  |
Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | 2,016 | 2,156
Subsidies to Polytetrafluoroethylene, Commenced in 2018 [Member] |  |
Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | 51 | 130
Subsidies to Tahoe-Single Bench Clean, Commenced in 2020 [Member] |  |
Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | 1,005 | 1,544
Subsidies to Backside Clean-YMTC National Project, Commenced in 2020 |  |
Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | 1,941 | 2,591
Other [Member] |  |
Other Long-term Liabilities [Abstract] |  |
Other long-term liabilities | $ 405 | $ 347

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