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OTHER LONG-TERM LIABILITIES (Tables) | 3 Months Ended
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Mar. 31, 2021
OTHER LONG-TERM LIABILITIES [Abstract] |
Other Long-Term Liabilities | Other long-term liabilities represent government subsidies received from PRC governmental authorities for development and commercialization of certain technology but not yet recognized. As of March 31, 2021 and December 31, 2020, other long-term liabilities consisted of the following unearned government subsidies:
|  | March 31, 2021 |  |  | December 31, 2020 |
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017 |  | $ | 1,221 |  |  | $ | 1,266 |
Subsidies to Electro Copper Plating project, commenced in 2014 |  |  | 2,016 |  |  |  | 2,156 |
Subsidies to Polytetrafluoroethylene, commenced in 2018 |  |  | 51 |  |  |  | 130 |
Subsidies to Tahoe-Single Bench Clean, commenced in 2020 |  |  | 1,005 |  |  |  | 1,544 |
Subsidies to Backside Clean-YMTC National Project, commenced in 2020 |  |  | 1,941 |  |  |  | 2,591 |
Other |  |  | 405 |  |  |  | 347 |
Total |  | $ | 6,639 |  |  | $ | 8,034 |

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- Definition Tabular disclosure of other noncurrent liabilities. + References No definition available. + Details
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