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OTHER LONG-TERM LIABILITIES
3 Months Ended
Mar. 31, 2021
OTHER LONG-TERM LIABILITIES [Abstract]  
OTHER LONG-TERM LIABILITIES
NOTE 13 – OTHER LONG-TERM LIABILITIES
 
Other long-term liabilities represent government subsidies received from PRC governmental authorities for development and commercialization of certain technology but not yet recognized. As of March 31, 2021 and December 31, 2020, other long-term liabilities consisted of the following unearned government subsidies:

 
 
March 31,
2021
   
December 31,
2020
 
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017
 
$
1,221
   
$
1,266
 
Subsidies to Electro Copper Plating project, commenced in 2014
   
2,016
     
2,156
 
Subsidies to Polytetrafluoroethylene, commenced in 2018
   
51
     
130
 
Subsidies to Tahoe-Single Bench Clean, commenced in 2020
   
1,005
     
1,544
 
Subsidies to Backside Clean-YMTC National Project, commenced in 2020
   
1,941
     
2,591
 
Other
   
405
     
347
 
Total
 
$
6,639
   
$
8,034