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REVENUE FROM CONTRACTS WITH CUSTOMERS (Tables)
3 Months Ended
Mar. 31, 2021
REVENUE FROM CONTRACTS WITH CUSTOMERS [Abstract]  
Disaggregated Revenue Information
The Company assesses revenues based upon the nature or type of goods or services it provides and the geographic location of the related businesses. The following tables present disaggregated revenue information:

 
Three Months Ended March 31,
 
   
2021
   
2020
 
Single Wafer Cleaning, Tahoe and Semi-Critical Cleaning Equipment
 
$
32,413
   
$
22,784
 
ECP (front-end and packaging), Furnace and Other Technologies
   
5,550
     
-
 
Advanced Packaging (excluding ECP), Services & Spares
   
5,769
     
1,564
 
Total Revenue By Product Category
   
43,732
     
24,348
 
                 
Wet cleaning and other front-end processing tools
   
31,900
     
22,784
 
Advanced packaging, other back-end processing tools, services and spares
   
11,832
     
1,564
 
Total Revenue Front-end and Back-End
 
$
43,732
   
$
24,348
 

 
Three Months Ended March 31,
 
   
2021
   
2020
 
Mainland China
 
$
43,696
   
$
24,289
 
Other Regions
   
36
     
59
 
   
$
43,732
   
$
24,348