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REVENUE FROM CONTRACTS WITH CUSTOMERS (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2021	Mar. 31, 2020
Disaggregated Revenue Information [Abstract]
Revenue	$ 43,732	$ 24,348
Mainland China [Member]
Disaggregated Revenue Information [Abstract]
Revenue	43,696	24,289
Oher Regions [Member]
Disaggregated Revenue Information [Abstract]
Revenue	36	59
Single Wafer Cleaning, Tahoe and Semi-Critical Cleaning Equipment [Member]
Disaggregated Revenue Information [Abstract]
Revenue	32,413	22,784
ECP (Front-end and Packaging), Furnace and Other Technologies [Member]
Disaggregated Revenue Information [Abstract]
Revenue	5,550	0
Advanced Packaging (Excluding ECP), Services & Spares [Member]
Disaggregated Revenue Information [Abstract]
Revenue	5,769	1,564
Wet Cleaning and Other Front-end Processing Tools [Member]
Disaggregated Revenue Information [Abstract]
Revenue	31,900	22,784
Advanced Packaging, Other Back-end Processing Tools, Services and Spares [Member]
Disaggregated Revenue Information [Abstract]
Revenue	$ 11,832	$ 1,564

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Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.

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