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OTHER LONG-TERM LIABILITIES (Details) - USD ($)
$ in Thousands
Mar. 31, 2021
Dec. 31, 2020
Other Long-term Liabilities [Abstract]    
Other long-term liabilities $ 6,639 $ 8,034
Subsidies to Stress Free Polishing Project, Commenced in 2008 and 2017 [Member]    
Other Long-term Liabilities [Abstract]    
Other long-term liabilities 1,221 1,266
Subsidies to Electro Copper Plating Project, Commenced in 2014 [Member]    
Other Long-term Liabilities [Abstract]    
Other long-term liabilities 2,016 2,156
Subsidies to Polytetrafluoroethylene, Commenced in 2018 [Member]    
Other Long-term Liabilities [Abstract]    
Other long-term liabilities 51 130
Subsidies to Tahoe-Single Bench Clean, Commenced in 2020 [Member]    
Other Long-term Liabilities [Abstract]    
Other long-term liabilities 1,005 1,544
Subsidies to Backside Clean-YMTC National Project, Commenced in 2020    
Other Long-term Liabilities [Abstract]    
Other long-term liabilities 1,941 2,591
Other [Member]    
Other Long-term Liabilities [Abstract]    
Other long-term liabilities $ 405 $ 347