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REVENUE FROM CONTRACTS WITH CUSTOMERS - Disaggregated Revenue (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2026	Jun. 30, 2025	Jun. 30, 2026	Jun. 30, 2025
Disaggregated Revenue Information [Abstract]
Revenues	$ 292,919	$ 215,372	$ 524,182	$ 387,719
Single Wafer Cleaning, Tahoe and Semi-Critical Cleaning Equipment
Disaggregated Revenue Information [Abstract]
Revenues	132,978	154,961	255,460	284,530
ECP (front-end and packaging), Furnace and Other Technologies
Disaggregated Revenue Information [Abstract]
Revenues	128,546	48,016	212,785	75,646
Advanced Packaging (excluding ECP), Services & Spares
Disaggregated Revenue Information [Abstract]
Revenues	$ 31,395	$ 12,395	$ 55,937	$ 27,543

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Disaggregated Revenue Information [Abstract]

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Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.

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