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SEGMENT INFORMATION (Net Revenue by Capital Equipment End Markets Served) (Details) - USD ($)
$ in Thousands
 12 Months Ended
Oct. 02, 2021
Oct. 03, 2020
Sep. 28, 2019
Revenues from External Customers and Long-Lived Assets [Line Items]      
Revenue $ 1,517,664 $ 623,176 $ 540,052
Capital Equipment      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Revenue 1,312,576 462,059 386,820
Capital Equipment | General Semiconductor      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Revenue [1] 928,259 290,220 209,885
Capital Equipment | Automotive & Industrial      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Revenue 129,817 60,169 77,365
Capital Equipment | LED      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Revenue 187,568 76,574 56,138
Capital Equipment | Memory      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Revenue $ 66,932 $ 35,096 $ 43,432
[1] The Company noted a growing portion of the general semiconductor and LED end market is increasing in complexity and driving more capital intensity, therefore demanding more advanced packaging solutions. This has reduced the relevance of the advanced packaging end market. In view of this, sales previously defined as advanced packaging will be primarily categorized within the general semiconductor end market.