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SEGMENT INFORMATION (Net Revenue by Capital Equipment End Markets Served) (Details) - USD ($) $ in Thousands	12 Months Ended
	Oct. 01, 2022	Oct. 02, 2021	Oct. 03, 2020
Revenues from External Customers and Long-Lived Assets [Line Items]
Revenue	$ 1,503,620	$ 1,517,664	$ 623,176
Capital Equipment
Revenues from External Customers and Long-Lived Assets [Line Items]
Revenue	1,306,468	1,312,576	462,059
Capital Equipment | General Semiconductor
Revenues from External Customers and Long-Lived Assets [Line Items]
Revenue	843,763	928,259	290,220
Capital Equipment | Automotive & Industrial
Revenues from External Customers and Long-Lived Assets [Line Items]
Revenue	198,138	129,817	60,169
Capital Equipment | LED
Revenues from External Customers and Long-Lived Assets [Line Items]
Revenue	137,077	187,568	76,574
Capital Equipment | Memory
Revenues from External Customers and Long-Lived Assets [Line Items]
Revenue	$ 127,490	$ 66,932	$ 35,096

X

- Definition

Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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