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SEGMENT INFORMATION (Tables)
3 Months Ended
Jan. 01, 2022
Segment Reporting [Abstract]  
Operating information by segment
The following table reflects operating information by segment for the three months ended January 1, 2022 and January 2, 2021: 
 Three months ended
(in thousands)January 1, 2022January 2, 2021
Net revenue:  
      Capital Equipment$408,528 $223,089 
      APS52,360 44,768 
              Net revenue460,888 267,857 
Income from operations:  
      Capital Equipment132,019 44,895 
      APS19,091 9,147 
              Income from operations$151,110 $54,042 
Schedule of net revenue by Capital Equipment end markets
The following table reflects net revenue by Capital Equipment end markets served for the three months ended January 1, 2022 and January 2, 2021: 
 Three months ended
(in thousands)January 1, 2022January 2, 2021
General Semiconductor$248,523 $163,586 
Automotive & Industrial
50,648 22,972 
LED
66,155 32,381 
Memory
43,202 4,150 
Total Capital Equipment revenue$408,528 $223,089 
Capital expenditures, depreciation and amortization expense
The following table reflects capital expenditures, depreciation expense and amortization expense for the three months ended January 1, 2022 and January 2, 2021:
 Three months ended
(in thousands)January 1, 2022January 2, 2021
Capital expenditures:
      Capital Equipment$1,966 $2,139 
      APS910 1,548 
$2,876 $3,687 
Depreciation expense:  
      Capital Equipment$2,283 $1,563 
      APS1,773 1,626 
$4,056 $3,189 
Amortization expense:
      Capital Equipment$1,012 $1,051 
      APS271 907 
$1,283 $1,958