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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($)
$ in Thousands
3 Months Ended
Jan. 01, 2022
Jan. 02, 2021
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues $ 460,888 $ 267,857
Capital Equipment    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 408,528 223,089
Capital Equipment | General Semiconductor    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 248,523 163,586
Capital Equipment | Automotive & Industrial    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 50,648 22,972
Capital Equipment | LED    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 66,155 32,381
Capital Equipment | Memory    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues $ 43,202 $ 4,150