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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Apr. 02, 2022	Apr. 03, 2021	Apr. 02, 2022	Apr. 03, 2021
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 384,282	$ 340,163	$ 845,170	$ 608,020
Capital Equipment
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	333,909	288,446	742,437	511,535
Capital Equipment | General Semiconductor
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	198,694	189,083	447,217	352,669
Capital Equipment | Automotive & Industrial
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	58,700	41,957	109,348	64,929
Capital Equipment | LED
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	42,036	50,740	108,191	83,121
Capital Equipment | Memory
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 34,479	$ 6,666	$ 77,681	$ 10,816

X

- Definition

Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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