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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jul. 02, 2022	Jul. 03, 2021	Jul. 02, 2022	Jul. 03, 2021
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 372,137	$ 424,318	$ 1,217,307	$ 1,032,338
Capital Equipment
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	321,946	370,187	1,064,383	881,722
Capital Equipment | General Semiconductor
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	223,034	280,563	670,251	633,234
Capital Equipment | Automotive & Industrial
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	51,018	38,488	160,366	103,416
Capital Equipment | LED
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	20,203	31,951	128,394	115,071
Capital Equipment | Memory
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 27,691	$ 19,185	$ 105,372	$ 30,001

X

- Definition

Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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