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SEGMENT INFORMATION (Net Revenue by Capital Equipment End Markets Served) (Details) - USD ($)
$ in Thousands
 12 Months Ended
Oct. 01, 2022
Oct. 02, 2021
Oct. 03, 2020
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue $ 1,503,620 $ 1,517,664 $ 623,176
Capital Equipment      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 1,503,620 1,517,664 623,176
Capital Equipment | General Semiconductor      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 843,763 928,259 290,220
Capital Equipment | Automotive & Industrial      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 198,138 129,817 60,169
Capital Equipment | LED      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 137,077 187,568 76,574
Capital Equipment | Memory      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 127,490 66,932 35,096
Capital Equipment | APS      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue $ 197,152 $ 205,088 $ 161,117