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SEGMENT INFORMATION (Net Revenue by Capital Equipment End Markets Served) (Details) - USD ($)
$ in Thousands
 12 Months Ended
Sep. 30, 2023
Oct. 01, 2022
Oct. 02, 2021
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue $ 742,491 $ 1,503,620 $ 1,517,664
General Semiconductor      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 333,937 843,763 928,259
Automotive & Industrial      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 175,249 198,138 129,817
LED      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 50,166 137,077 187,568
Memory      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 22,421 127,490 66,932
APS      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue 160,718 197,152 205,088
Ball Bonding Equipment      
Revenues from External Customers and Long-Lived Assets [Line Items]      
Total revenue $ 287,465 $ 909,428 $ 1,016,663