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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($)
$ in Thousands
3 Months Ended
Dec. 31, 2022
Jan. 01, 2022
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues $ 176,233 $ 460,888
Capital Equipment    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 135,372 408,528
Capital Equipment | General Semiconductor    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 68,372 248,523
Capital Equipment | Automotive & Industrial    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 53,180 50,648
Capital Equipment | LED    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues 9,193 66,155
Capital Equipment | Memory    
Segment Reporting, Revenue Reconciling Item [Line Items]    
Revenues $ 4,627 $ 43,202