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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Apr. 01, 2023	Apr. 02, 2022	Apr. 01, 2023	Apr. 02, 2022
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 173,021	$ 384,282	$ 349,254	$ 845,170
Capital Equipment
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	133,727	333,909	269,099	742,437
Capital Equipment | General Semiconductor
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	71,064	198,694	139,436	447,217
Capital Equipment | Automotive & Industrial
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	51,455	58,700	104,635	109,348
Capital Equipment | LED
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	5,894	42,036	15,087	108,191
Capital Equipment | Memory
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 5,314	$ 34,479	$ 9,941	$ 77,681

X

- Definition

Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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