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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Mar. 30, 2024	Apr. 01, 2023	Mar. 30, 2024	Apr. 01, 2023
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	$ 172,074	$ 173,021	$ 343,263	$ 349,254
Segments other than APS | General Semiconductor
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	90,137	71,064	161,085	139,436
Segments other than APS | Automotive & Industrial
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	25,368	51,455	48,889	104,635
Segments other than APS | LED
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	5,575	5,894	11,307	15,087
Segments other than APS | Memory
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	10,327	5,314	40,074	9,941
APS
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	$ 40,667	$ 39,294	$ 81,908	$ 80,155

X

- Definition

Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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