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SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 29, 2024	Jul. 01, 2023	Jun. 29, 2024	Jul. 01, 2023
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	$ 181,650	$ 190,917	$ 524,913	$ 540,171
Segments other than APS | General Semiconductor
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	89,154	77,745	250,239	217,186
Segments other than APS | Automotive & Industrial
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	32,086	44,973	80,975	149,608
Segments other than APS | LED
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	7,975	17,678	19,282	32,765
Segments other than APS | Memory
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	14,376	10,849	54,450	20,790
APS
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenue	$ 38,059	$ 39,672	$ 119,967	$ 119,822

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Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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