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Inventories (Tables) | 12 Months Ended
--- | ---
Dec. 31, 2021
Inventories |
Schedule of inventories | ​
​ | ​ | ​ | ​ | ​ | ​
​ |  | December 31, | ​ | December 31,
​ | ​ | 2020 |  | 2021
​ | ​ | ​ | (in thousands)
​ | ​ | ​ | ​ |  | ​
Finished goods | ​ | $ | 23,990 | ​ | 53,884
Work in process | ​ |  | 63,025 | ​ | 107,355
Raw materials | ​ |  | 21,346 | ​ | 36,963
Supplies | ​ |  | 346 | ​ | 398
​ | ​ | $ | 108,707 | ​ | 198,600

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