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Inventories (Tables)

12 Months Ended

Dec. 31, 2021

Inventories

Schedule of inventories

​

​	​	​	​	​	​
​		December 31,		​	December 31,
​	​	2020			2021
​	​	​	(in thousands)
​	​	​	​		​
Finished goods	​	$	23,990	​	53,884
Work in process	​		63,025	​	107,355
Raw materials	​		21,346	​	36,963
Supplies	​		346	​	398
​	​	$	108,707	​	198,600

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