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  <xsd:element name="AccrualOfPaymentsForNetAssetsOfBusinessesAcquired" id="veco_AccrualOfPaymentsForNetAssetsOfBusinessesAcquired" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element name="StockCompensationPlansAndEquityNoteDisclosureTextBlock" id="veco_StockCompensationPlansAndEquityNoteDisclosureTextBlock" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="IncreaseDecreaseInAccruedLiabilitiesDeferredProfitAndOtherCurrentLiabilities" id="veco_IncreaseDecreaseInAccruedLiabilitiesDeferredProfitAndOtherCurrentLiabilities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element name="CommitmentsAndContingenciesConcentrationRiskLeasesOfLesseeEnvironmentalLossContingencyDisclosureTextBlock" id="veco_CommitmentsAndContingenciesConcentrationRiskLeasesOfLesseeEnvironmentalLossContingencyDisclosureTextBlock" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="EquityDisclosureAbstract" id="veco_EquityDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="PaymentsToAcquireBusinessesNetOfEarnOuts" id="veco_PaymentsToAcquireBusinessesNetOfEarnOuts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="BalanceSheetInformationDisclosureAbstract" id="veco_BalanceSheetInformationDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="AdjustmentsNoncashItemsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesDiscontinuedOperations" id="veco_AdjustmentsNoncashItemsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesDiscontinuedOperations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element name="IncreaseDecreaseInSupplierDeposits" id="veco_IncreaseDecreaseInSupplierDeposits" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="MetrologyMember" id="veco_MetrologyMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="PeriodOfRestrictionOnUseOfProceedsFromSalesOfAssetsInvestingActivities" id="veco_PeriodOfRestrictionOnUseOfProceedsFromSalesOfAssetsInvestingActivities" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant"/>
  <xsd:element name="FairValueAssetsAndLiabilitiesMeasuredOnNonrecurringBasisLineItems" id="veco_FairValueAssetsAndLiabilitiesMeasuredOnNonrecurringBasisLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="AssetsLiabilitiesNetFairValueDisclosure" id="veco_AssetsLiabilitiesNetFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element name="LightEmittingDiodeAndSolarSegmentMember" id="veco_LightEmittingDiodeAndSolarSegmentMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="DataStorageMember" id="veco_DataStorageMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="RestructuringReserveReversalOfLeaseCosts" id="veco_RestructuringReserveReversalOfLeaseCosts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="RestructuringReserveReclassification" id="veco_RestructuringReserveReclassification" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="IncomeLossFromContinuingOperationsBeforeInterestIncomeTaxesAmortizationAndOthersMinorityInterestAndIncomeLossFromEquityMethodInvestments" id="veco_IncomeLossFromContinuingOperationsBeforeInterestIncomeTaxesAmortizationAndOthersMinorityInterestAndIncomeLossFromEquityMethodInvestments" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualLifeAbstract" id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualLifeAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="SalePriceOfDiscontinuedBusiness" id="veco_SalePriceOfDiscontinuedBusiness" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element name="WorkingCapitalDivestedFromDeconsolidation" id="veco_WorkingCapitalDivestedFromDeconsolidation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element name="DebtInstrumentExchangeRatePrincipalAmountUsedInCalculation" id="veco_DebtInstrumentExchangeRatePrincipalAmountUsedInCalculation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="DebtInstrumentConvertibleConversionPremiumOverClosingMarketPrice" id="veco_DebtInstrumentConvertibleConversionPremiumOverClosingMarketPrice" type="num:percentItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant"/>
  <xsd:element name="TreasuryStockAbstract" id="veco_TreasuryStockAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="RestrictedStockUnitsAwardsMember" id="veco_RestrictedStockUnitsAwardsMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="NumberOfWeeksInFiscalQuarter52WeekYear" id="veco_NumberOfWeeksInFiscalQuarter52WeekYear" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisLineItems" id="veco_FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="WeightedAverageNotionalAmountOfDerivatives" id="veco_WeightedAverageNotionalAmountOfDerivatives" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element name="FinancialInstrumentsOwnedCommercialPaperAtFairValue" id="veco_FinancialInstrumentsOwnedCommercialPaperAtFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element name="BankGuaranteeCollateralMember" id="veco_BankGuaranteeCollateralMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="DebtInstrumentConvertibleDebtPrincipalPaidInCashOnConversion" id="veco_DebtInstrumentConvertibleDebtPrincipalPaidInCashOnConversion" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element name="DebtInstrumentUnamortizedDiscountRemaining" id="veco_DebtInstrumentUnamortizedDiscountRemaining" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element name="DeferredProfitCurrent" id="veco_DeferredProfitCurrent" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element name="IncrementalCommonSharesAttributableToConversionOfDebtSecuritiesUsingTreasuryStockMethod" id="veco_IncrementalCommonSharesAttributableToConversionOfDebtSecuritiesUsingTreasuryStockMethod" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="BusinessAcquisitionAcquireeMember" id="veco_BusinessAcquisitionAcquireeMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="CoreTechnologyMember" id="veco_CoreTechnologyMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="GoodwillAbstract" id="veco_GoodwillAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="CopperIndiumGalliumSelenideMember" id="veco_CopperIndiumGalliumSelenideMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration"/>
  <xsd:element name="NumberOfEmployeesExpectedToBeImpactedByDiscontinuationOfBusiness" id="veco_NumberOfEmployeesExpectedToBeImpactedByDiscontinuationOfBusiness" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant"/>
  <xsd:element name="AssetImpairmentAndRelatedCharges" id="veco_AssetImpairmentAndRelatedCharges" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant"/>
  <xsd:element name="ForeignCurrencyContractApproximateLossesAccrued" id="veco_ForeignCurrencyContractApproximateLossesAccrued" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="credit" xbrli:periodType="instant"/>
</xsd:schema>
