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Discontinued Operations (Details) (USD $)
3 Months Ended 6 Months Ended 1 Months Ended 3 Months Ended 6 Months Ended
Jun. 30, 2011
Jun. 30, 2010
Jun. 30, 2011
Jun. 30, 2010
Dec. 31, 2010
Oct. 31, 2010
Metrology Segment Disposal
Jun. 30, 2011
Metrology Segment Disposal
Jun. 30, 2010
Metrology Segment Disposal
Jun. 30, 2011
Metrology Segment Disposal
Jun. 30, 2010
Metrology Segment Disposal
Oct. 07, 2010
Metrology Segment Disposal
Aug. 15, 2010
Metrology Segment Disposal
Information related to discontinued operations                        
Sale amount of discontinued operations as per the agreement                       $ 229,400,000
Working capital adjustment which is included in total proceeds                     1,000,000  
Proceeds from divestiture of businesses           230,400,000            
Amount of proceeds related to assets in China                     7,200,000  
Deferred gain related to the assets in China                     5,400,000  
Restricted cash 54,484,000   54,484,000   76,115,000           22,900,000  
Restriction period on use of proceeds which are held in escrow (in years)                     1  
Net sales               31,650,000   60,131,000    
Cost of sales               16,693,000   31,565,000    
Gross profit               14,957,000   28,566,000    
Total operating expenses             397,000 11,062,000 895,000 20,709,000    
Operating (loss) income (397,000) 3,895,000 (895,000) 7,857,000     (397,000) 3,895,000 (895,000) 7,857,000    
Net (loss) income from discontinued operations, net of tax $ (6,000) $ 2,463,000 $ (447,000) $ 5,682,000     $ (6,000) $ 2,463,000 $ (447,000) $ 5,682,000