EX-21.1 4 a2207410zex-21_1.htm EX-21.1
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Exhibit 21.1

Subsidiaries of the Registrant

Subsidiary |  | Jurisdiction of Organization
--- | --- | ---
U.S. Subsidiaries |  |
Veeco APAC Inc. |  | DE
Veeco Flow Technologies LLC |  | DE
Veeco Process Equipment Inc. |  | DE
Veeco TK LLC |  | DE
Foreign Subsidiaries |  |
Nihon Veeco K.K. |  | Japan
Veeco Asia Pte. Ltd. |  | Singapore
Veeco Malaysia Sdn. Bhd. |  | Malaysia
Veeco Korea LLC |  | Korea
Veeco Instruments GmbH |  | Germany
Veeco Instruments Limited |  | England
Veeco Instruments S.A.S. |  | France
Veeco Instruments B.V. |  | Netherlands
Veeco Instruments (Shanghai) Co. Ltd. |  | China
Veeco Taiwan Inc. |  | Taiwan

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Exhibit 21.1

Subsidiaries of the Registrant