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Balance Sheet Information (Details 2) (USD $) | Dec. 31, 2011 | Dec. 31, 2010 | Dec. 31, 2010 Metrology Segment Disposal Y | Oct. 07, 2010 Metrology Segment Disposal Y | Dec. 31, 2011 Collateral for Bank Guarantees | Dec. 31, 2010 Collateral for Bank Guarantees
--- | --- | --- | --- | --- | --- | ---
Restricted Cash |  |  |  |  |  |
Restricted cash | $ 577,000 | $ 76,115,000 | $ 22,900,000 | $ 22,900,000 | $ 600,000 | $ 53,200,000
Restriction period on use of proceeds which are held in escrow (in years) |  |  | 1 | 1 |  |
Accounts Receivable, net |  |  |  |  |  |
Allowance for doubtful accounts receivable (in dollars) | 500,000 | 500,000 |  |  |  |
Inventories |  |  |  |  |  |
Raw materials | 57,169,000 | 49,953,000 |  |  |  |
Work in process | 20,118,000 | 33,181,000 |  |  |  |
Finished goods | 36,147,000 | 25,353,000 |  |  |  |
Inventories | $ 113,434,000 | $ 108,487,000 |  |  |  |

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