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Equity Compensation Plans and Equity (Details) (USD $)	12 Months Ended
	Dec. 31, 2011	Dec. 31, 2010	Dec. 31, 2009
Equity Compensation Plans
Equity-based compensation expense (in dollars)	$ 12,807,000	$ 8,769,000	$ 7,113,000
Former CFO
Equity Compensation Plans
Equity-based compensation expense (in dollars)			700,000
CIGS Solar Systems Abandonment
Equity Compensation Plans
Equity-based compensation expense (in dollars)	700,000	900,000	400,000
Metrology Segment Disposal
Equity Compensation Plans
Equity-based compensation expense (in dollars)		7,700,000	1,000,000
2010 Stock Incentive Plan
Equity Compensation Plans
Maximum number of shares authorized to be issued	3,500,000
2000 Stock Incentive Plan
Equity Compensation Plans
Minimum vesting period (in years)	P2Y
Maximum vesting period (in years)	P5Y
Number of options outstanding (in shares)	1,205,743
Expiration period (in years)	P7Y
Stock options
Equity Compensation Plans
Number of options outstanding (in shares)	2,106,000	2,569,000
Unrecognized equity-based compensation costs (in dollars)	12,800,000
Period over which unrecognized equity-based compensation costs will be recognized (in years)	1.9
Assumptions based on which fair value of each option granted was estimated using the Black-Scholes option-pricing model
Weighted-average expected stock-price volatility (as a percent)	55.00%	62.00%	65.00%
Weighted-average expected option life (in years)	4	5	4
Average risk-free interest rate (as a percent)	1.40%	1.92%	1.79%
Average dividend yield (as a percent)	0.00%	0.00%	0.00%
Stock options | 2010 Stock Incentive Plan
Equity Compensation Plans
Vesting period (in years)	3 years
Number of options outstanding (in shares)	900,034
Stock options | 2010 Stock Incentive Plan | Minimum
Equity Compensation Plans
Term of awards (in years)	7
Stock options | 2010 Stock Incentive Plan | Maximum
Equity Compensation Plans
Term of awards (in years)	10
Restricted Stock Awards and Restricted Stock Units [Member]
Equity Compensation Plans
Minimum vesting period (in years)	P3Y
Maximum vesting period (in years)	P4Y
Unrecognized equity-based compensation costs (in dollars)	15,700,000
Period over which unrecognized equity-based compensation costs will be recognized (in years)	3.0
Other disclosures
Granted (in shares)	304,000
Total grant date fair value of shares vested	$ 9,700,000
Restricted Stock Awards and Restricted Stock Units [Member] | Key employees
Other disclosures
Granted (in shares)	304,356
Restricted Stock
Other disclosures
Shares cancelled in 2011 due to employees electing to receive fewer shares in lieu of paying withholding taxes	67,256
Restricted Stock | Non-employee members of the Board of Directors
Equity Compensation Plans
Maximum vesting period (in years)	P1Y
Other disclosures
Granted (in shares)	9,826
Restricted Stock | 2010 Stock Incentive Plan
Equity Compensation Plans
Minimum vesting period (in years)	P1Y
Maximum vesting period (in years)	P5Y

X

- Definition

Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.

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As of the balance sheet date, the aggregate unrecognized cost of equity-based awards made to employees under equity-based compensation awards that have yet to vest.

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The weighted average period over which unrecognized compensation is expected to be recognized for equity-based compensation plans, using a decimal to express in number of years.

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The date when the equity-based award expires as specified in the award agreement, which may be presented in a variety of ways (for example, year, month and year, day, month and year, quarter of a year).

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Description of the period of time over which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, which may be expressed in a variety of ways (for example, in years, month and year).

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The maximum vesting term over which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition.

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The minimum vesting term over which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition.

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- Definition

The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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The total fair value of equity-based awards for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.

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The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.

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- Definition

The period of time an equity-based award is expected to be outstanding. An equity-based award's expected term is generally determined based on, among other factors, the instrument's contractual term and the effects of employees' expected exercise and post-vesting employment termination behavior.

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The risk-free interest rate assumption that is used in valuing an option on its own shares.

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The range of expected volatilities used and the weighted-average expected volatility for an entity using a valuation technique with different volatilities during the contractual term.

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The maximum number of shares (or other type of equity) originally approved (usually by shareholders and board of directors), net of any subsequent amendments and adjustments, for awards under the equity-based compensation plan. As stock or unit options and equity instruments other than options are awarded to participants, the shares or units remain authorized and become reserved for issuance under outstanding awards (not necessarily vested).

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The number of shares reserved for issuance under stock option agreements awarded under the plan that validly exist and are outstanding as of the balance sheet date, including vested options.

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For net-share settlement of share-based awards when the employer settles employees' income tax withholding obligations, this element represents the number of shares the employees use to repay the employer.

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Represents the contractual term over which the equity based award expires.

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