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Equity (Details 3) (USD $) In Millions, unless otherwise specified | 1 Months Ended
--- | ---
Aug. 31, 2010
Treasury Stock |
Authorized amount of common stock repurchase (in dollars) | $ 200

X
- Definition The amount authorized by an entity's Board of Directors under a stock repurchase plan. + References No definition available. + Details
Name: | us-gaap_StockRepurchaseProgramAuthorizedAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | veco_TreasuryStockAbstract
Namespace Prefix: | veco_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration