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Equity Compensation Plans and Equity (Details) (USD $)
In Millions, except Share data, unless otherwise specified
12 Months Ended
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Equity Compensation Plans      
Equity compensation expense $ 14.3 $ 12.8 $ 8.8
2010 Stock Incentive Plan
     
Equity Compensation Plans      
Maximum number of shares authorized to be issued 3,500,000    
2000 Stock Incentive Plan
     
Equity Compensation Plans      
Number of options outstanding (in shares) 873,522    
Other disclosures      
Expiration term 7 years    
2000 Stock Incentive Plan | Minimum
     
Equity Compensation Plans      
Vesting period 2 years    
2000 Stock Incentive Plan | Maximum
     
Equity Compensation Plans      
Vesting period 5 years    
CIGS Solar Systems Abandonment
     
Equity Compensation Plans      
Equity compensation expense   0.7 0.9
Metrology Segment Disposal
     
Equity Compensation Plans      
Equity compensation expense     7.7
Stock options
     
Equity Compensation Plans      
Number of options outstanding (in shares) 2,322,000 2,106,000  
Unrecognized equity-based compensation costs 13.1    
Period over which unrecognized equity-based compensation costs will be recognized 2 years    
Assumptions based on which fair value of each option granted was estimated using the Black-Scholes option-pricing model      
Weighted-average expected stock-price volatility (as a percent) 59.00% 55.00% 62.00%
Weighted-average expected option life 5 years 4 years 5 years
Average risk-free interest rate (as a percent) 0.70% 1.40% 1.92%
Average dividend yield (as a percent) 0.00% 0.00% 0.00%
Stock options | 2010 Stock Incentive Plan
     
Equity Compensation Plans      
Vesting period 3 years    
Number of options outstanding (in shares) 1,448,132    
Stock options | 2010 Stock Incentive Plan | Minimum
     
Equity Compensation Plans      
Term of awards 7 years    
Stock options | 2010 Stock Incentive Plan | Maximum
     
Equity Compensation Plans      
Term of awards 10 years    
Restricted Stock and Restricted Stock Units
     
Equity Compensation Plans      
Unrecognized equity-based compensation costs 17.2    
Period over which unrecognized equity-based compensation costs will be recognized 2 years 9 months 18 days    
Other disclosures      
Granted (in shares) 324,000    
Total grant date fair value of shares vested $ 5.4 $ 9.7 $ 13.6
Restricted Stock and Restricted Stock Units | Key employees
     
Equity Compensation Plans      
Vesting period 4 years    
Other disclosures      
Granted (in shares) 323,766    
Restricted Stock and Restricted Stock Units | Non-employee members of the Board of Directors | Maximum
     
Equity Compensation Plans      
Vesting period 1 year    
Restricted Stock
     
Other disclosures      
Shares cancelled in 2012 due to employees electing to receive fewer shares in lieu of paying withholding taxes 53,399    
Restricted Stock | Non-employee members of the Board of Directors
     
Other disclosures      
Granted (in shares) 15,294    
Restricted Stock | 2010 Stock Incentive Plan | Minimum
     
Equity Compensation Plans      
Vesting period 1 year    
Restricted Stock | 2010 Stock Incentive Plan | Maximum
     
Equity Compensation Plans      
Vesting period 5 years