EX-21.1 4 a14-4581_1ex21d1.htm EX-21.1

Exhibit 21.1

Subsidiaries of the Registrant

Subsidiary |  | Jurisdiction of Organization
U.S. Subsidiaries |  |
Veeco ALD Inc. |  | DE
Veeco APAC Inc. |  | DE
Veeco Process Equipment Inc. |  | DE
Veeco TK LLC |  | DE
Foreign Subsidiaries |  |
Nihon Veeco K.K. |  | Japan
Veeco ALD Korea Ltd. |  | South Korea
Veeco Asia Pte. Ltd. |  | Singapore
Veeco Malaysia Sdn. Bhd. |  | Malaysia
Veeco Korea LLC |  | South Korea
Veeco Instruments GmbH |  | Germany
Veeco Instruments Limited |  | England
Veeco Instruments (Shanghai) Co. Ltd. |  | China
Veeco Taiwan Inc. |  | Taiwan