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Discontinued Operations (Details) (USD $)
 0 Months Ended 12 Months Ended 0 Months Ended 12 Months Ended
Oct. 02, 2013
Oct. 02, 2012
Dec. 31, 2013
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2012
CIGS Solar Systems Business
Dec. 31, 2011
CIGS Solar Systems Business
Oct. 07, 2010
Metrology
Dec. 31, 2012
Metrology
Dec. 31, 2011
Metrology
Dec. 31, 2010
Metrology
Discontinued operations                      
Total pre-tax charges             $ 69,800,000        
Asset impairment charge 0 0 1,220,000 1,335,000 584,000   6,200,000        
Goodwill write-off             10,800,000        
Inventory write-offs             27,000,000        
Charges to settle contracts             22,100,000        
Lease related charges             1,400,000        
Personnel severance charges             2,300,000        
Working capital adjustment which is included in total proceeds               1,000,000      
Proceeds from divestiture of businesses               230,400,000      
Amount of proceeds related to assets in China               7,200,000      
Gain on disposal, pre-tax                     156,300,000
Pre-tax deferred gain related to net assets in China                     5,400,000
Deferred pre-tax gain recognized on sale of business in China                 5,400,000    
Gain on sale of assets of discontinued segment       1,400,000              
Gain on sale of assets of discontinued segment, net of taxes       1,100,000              
Net (loss) income from discontinued operations       $ 4,399,000 $ (62,515,000) $ (62,000) $ (61,453,000)   $ 4,461,000 $ (1,062,000)