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Selected Quarterly Financial Information (Details 3) (USD $)
 0 Months Ended 12 Months Ended
Dec. 31, 2013
Dec. 31, 2012
Oct. 07, 2010
Metrology Divestiture
Dec. 31, 2012
Metrology Divestiture
Dec. 31, 2010
Metrology Divestiture
Aug. 15, 2010
Metrology Divestiture
Information related to discontinued operations            
Sale amount of discontinued operations as per the agreement           $ 229,400,000
Working capital adjustment which is included in total proceeds     1,000,000      
Proceeds from divestiture of businesses     230,400,000      
Amount of proceeds related to assets in China     7,200,000      
Restricted cash 2,738,000 2,017,000 22,900,000      
Proceeds received from sale deposit in escrow     22,900,000      
Restriction period on use of proceeds which are held in escrow (in years)     1 year      
Transaction costs of disposition         5,200,000  
Gain on disposal, pre-tax         156,300,000  
Pre-tax deferred gain related to net assets in China         5,400,000  
Deferred pre-tax gain recognized on sale of business in China       $ 5,400,000