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Stock Plans (Details 3) (USD $) In Thousands, except Per Share data, unless otherwise specified | 12 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012
Options Outstanding |  |  |
Shares | 2,391us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions |  |
Aggregate Intrinsic Value | $ 12,395us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue |  |
Weighted-Average Remaining Contractual Life | 6 years 2 months 12 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 31.65us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1 |  |
Options Exercisable |  |  |
Shares | 1,409us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions |  |
Aggregate Intrinsic Value | 10,127us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 |  |
Weighted Average Remaining Contractual life | 5 years 2 months 12 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 30.76us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1 |  |
Assumptions based on which fair value of each option granted was estimated using the Black-Scholes option-pricing model |  |  |
Cash received from options exercised | 12,056us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions | 2,199us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions | 5,409us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions
Intrinsic value of options exercised | 8,390us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue | 2,509us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue | 6,800us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
$8.82 - $17.48 |  |  |
Information about stock options outstanding |  |  |
Exercise price, low end of range (in dollars per share) | $ 8.82us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Exercise price, high end of range (in dollars per share) | $ 17.48us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Options Outstanding |  |  |
Shares | 386us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Aggregate Intrinsic Value | 8,769us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Weighted-Average Remaining Contractual Life | 1 year 3 months 18 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 12.15us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Options Exercisable |  |  |
Shares | 386us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Aggregate Intrinsic Value | 8,769us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
Weighted Average Remaining Contractual life | 1 year 3 months 18 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 12.15us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeOneMember |  |
$20.80 - $31.45 |  |  |
Information about stock options outstanding |  |  |
Exercise price, low end of range (in dollars per share) | $ 20.80us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Exercise price, high end of range (in dollars per share) | $ 31.45us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Options Outstanding |  |  |
Shares | 347us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Aggregate Intrinsic Value | 1,626us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Weighted-Average Remaining Contractual Life | 8 years 9 months 18 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 30.20us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Options Exercisable |  |  |
Shares | 125us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Aggregate Intrinsic Value | 616us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
Weighted Average Remaining Contractual life | 8 years 8 months 12 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 29.94us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeTwoMember |  |
$31.91 - $48.04 |  |  |
Information about stock options outstanding |  |  |
Exercise price, low end of range (in dollars per share) | $ 31.91us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Exercise price, high end of range (in dollars per share) | $ 48.04us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Options Outstanding |  |  |
Shares | 1,429us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Aggregate Intrinsic Value | 2,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Weighted-Average Remaining Contractual Life | 6 years 10 months 24 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 34.14us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Options Exercisable |  |  |
Shares | 669us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Aggregate Intrinsic Value | $ 742us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
Weighted Average Remaining Contractual life | 6 years 4 months 24 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 34.63us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeThreeMember |  |
$48.90 - $51.70 |  |  |
Information about stock options outstanding |  |  |
Exercise price, low end of range (in dollars per share) | $ 48.90us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeFourMember |  |
Exercise price, high end of range (in dollars per share) | $ 51.70us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeFourMember |  |
Options Outstanding |  |  |
Shares | 229us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeFourMember |  |
Weighted-Average Remaining Contractual Life | 6 years 4 months 24 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 51.21us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeFourMember |  |
Options Exercisable |  |  |
Shares | 229us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeFourMember |  |
Weighted Average Remaining Contractual life | 6 years 4 months 24 days |  |
Weighted-Average Exercise Price (in dollars per share) | $ 51.21us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1 / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = veco_RangeOfExercisePricesRangeFourMember |  |
Stock Options |  |  |
Assumptions based on which fair value of each option granted was estimated using the Black-Scholes option-pricing model |  |  |
Weighted average fair value | $ 11.58us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | $ 13.47us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | $ 15.56us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember
Dividend yield | 0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | 0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | 0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember
Expected volatility factor | 44.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | 49.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | 59.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember
Risk-free interest rate | 1.19%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | 1.27%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember | 0.70%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate / us-gaap_AwardTypeAxis = us-gaap_EmployeeStockOptionMember
Expected life (in years) | 3 years 10 months 24 days | 4 years 6 months | 4 years 6 months

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- Definition The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (f)(2)(iii) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition Expected term of share-based compensation awards, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SAB TOPIC 14.D.2) -URI http://asc.fasb.org/extlink&oid=27013229&loc=d3e301413-122809 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (f)(2)(i) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Staff Accounting Bulletin (SAB) -Number Topic 14 -Section D -Subsection 2 + Details
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- Definition Amount of difference between fair value of the underlying shares reserved for issuance and exercise price of vested portions of options outstanding and currently exercisable. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (d)(2) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition The weighted average grant-date fair value of options granted during the reporting period as calculated by applying the disclosed option pricing methodology. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (d)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition Amount by which the current fair value of the underlying stock exceeds the exercise price of options outstanding. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition Weighted average remaining contractual term of outstanding stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (e)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition The ceiling of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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