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Business Combinations (Details) (USD $) | 12 Months Ended | 0 Months Ended | 1 Months Ended | 0 Months Ended | 3 Months Ended
--- | --- | --- | --- | --- | ---
Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012 | Dec. 04, 2014 | Dec. 31, 2014 | Oct. 01, 2013 | Dec. 31, 2014 | Mar. 31, 2014
Business combination |  |  |  |  |  |  |  |
Increase in goodwill as result of working capital adjustments | $ 173,000us-gaap_GoodwillPurchaseAccountingAdjustments |  |  |  |  |  |  |
Fair value of the consideration transferred |  |  |  |  |  |  |  |
Contingent consideration earned and paid |  | 5,000,000veco_BusinessCombinationContingentConsiderationEarnedAndPaid |  |  |  |  |  |
Summary of estimated fair values of the assets acquired and liabilities assumed |  |  |  |  |  |  |  |
Goodwill | 114,959,000us-gaap_Goodwill | 91,348,000us-gaap_Goodwill | 55,828,000us-gaap_Goodwill |  | 114,959,000us-gaap_Goodwill |  | 114,959,000us-gaap_Goodwill |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Asset impairment | 58,170,000us-gaap_AssetImpairmentCharges | 1,220,000us-gaap_AssetImpairmentCharges | 1,335,000us-gaap_AssetImpairmentCharges |  |  |  |  |
PSP |  |  |  |  |  |  |  |
Business combination |  |  |  |  |  |  |  |
Percentage of ownership acquired |  |  |  | 100.00%us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Fair value of the consideration transferred |  |  |  |  |  |  |  |
Amount paid (net of cash acquired) |  |  |  | 145,382,000us-gaap_PaymentsToAcquireBusinessesGross / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Working capital adjustment |  |  |  | 88,000veco_BusinessAcquisitionWorkingCapitalAdjustment / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Total |  |  |  | 145,470,000us-gaap_BusinessCombinationConsiderationTransferred1 / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Summary of estimated fair values of the assets acquired and liabilities assumed |  |  |  |  |  |  |  |
Account receivable |  |  |  | 9,383,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsReceivables / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Inventory |  |  |  | 13,812,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Other current assets |  |  |  | 463,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Property, plant, and equipment |  |  |  | 6,912,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Intangible assets |  |  |  | 79,810,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Total identifiable assets acquired |  |  |  | 110,380,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Accounts payable and accrued expenses |  |  |  | 6,473,000veco_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayableAndAccruedExpenses / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Customer deposits |  |  |  | 6,039,000veco_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentliabilitiesCustomerDeposits / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Other |  |  |  | 1,089,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesOther / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Estimated deferred tax liability, net |  |  |  | 2,705,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedDeferredTaxLiabilitiesNoncurrent / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Total liabilities assumed |  |  |  | 16,306,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Net identifiable assets acquired |  |  |  | 94,074,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Goodwill |  |  |  | 51,396,000us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Net assets acquired |  |  |  | 145,470,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Gross contractual value of accounts receivable |  |  |  | 10,500,000veco_BusinessCombinationAccountsReceivableGrossContractualValue / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Percentage of goodwill expected to be tax deductible |  |  |  | 80.00%veco_BusinessAcquisitionPurchasePriceAllocationGoodwillExpectedTaxDeductiblePercentage / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  | 79,810,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Intangible assets acquired, amount |  |  |  | 79,810,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |
Acquisition related costs | 3,200,000us-gaap_BusinessCombinationAcquisitionRelatedCosts / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |  |  |  |
Revenue and income (loss) from continuing operations before income taxes |  |  |  |  |  |  |  |
Revenue |  |  |  |  | 7,906,000us-gaap_BusinessCombinationProFormaInformationRevenueOfAcquireeSinceAcquisitionDateActual / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |
Net Income (loss) |  |  |  |  | (3,011,000)us-gaap_BusinessCombinationProFormaInformationEarningsOrLossOfAcquireeSinceAcquisitionDateActual / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |
Pro forma consolidated statement of operations |  |  |  |  |  |  |  |
Revenue | 447,089,000us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember | 379,272,000us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |  |  |
Income (loss) from continuing operations before income taxes | (68,715,000)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember | (77,252,000)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember |  |  |  |  |  |
PSP | Technology |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  | 39,950,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = veco_CoreTechnologyMember |  |  |  |
Average useful life |  |  |  | 10 years |  |  |  |
PSP | Customer relationship |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  | 34,310,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |  |  |  |
Average useful life |  |  |  | 14 years |  |  |  |
PSP | Backlog |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  | 3,340,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_OrderOrProductionBacklogMember |  |  |  |
Average useful life |  |  |  | 6 months |  |  |  |
PSP | Trademarks and tradenames |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  | 1,080,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |  |  |  |
Average useful life |  |  |  | 1 year |  |  |  |
PSP | Non-compete agreements |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  | 1,130,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SolidStateEquipmentLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_NoncompeteAgreementsMember |  |  |  |
Average useful life |  |  |  | 2 years |  |  |  |
ALD |  |  |  |  |  |  |  |
Business combination |  |  |  |  |  |  |  |
Percentage of ownership acquired |  |  |  |  |  | 100.00%us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Decrease in working capital adjustment | 1,400,000veco_BusinessAcquisitionIncreaseDecreaseInWorkingCapitalAdjustment / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  |  |
Increase in goodwill as result of working capital adjustments | 200,000us-gaap_GoodwillPurchaseAccountingAdjustments / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  |  |
Reduction in accrued expenses as a result of working capital adjustment | 1,200,000us-gaap_IncreaseDecreaseInAccruedLiabilities / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  |  |
Working capital adjustment payment received | 1,300,000veco_BusinessAcquisitionWorkingCapitalAdjustmentPaymentReceived / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  |  |
Fair value of the consideration transferred |  |  |  |  |  |  |  |
Amount paid (net of cash acquired) |  |  |  |  |  | 71,488,000us-gaap_PaymentsToAcquireBusinessesGross / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Contingent consideration |  |  |  |  |  | 33,539,000veco_BusinessAcquisitionContingentConsiderationFairValue / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Working capital adjustment |  |  |  |  |  | (2,695,000)veco_BusinessAcquisitionWorkingCapitalAdjustment / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Total |  |  |  |  |  | 102,332,000us-gaap_BusinessCombinationConsiderationTransferred1 / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Contingent consideration earned and paid |  | 5,000,000veco_BusinessCombinationContingentConsiderationEarnedAndPaid / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  |
Amount of change in contingent consideration as a result of changes in the fair value | (29,400,000)us-gaap_BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationLiability1 / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember | 800,000us-gaap_BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationLiability1 / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  | (29,400,000)us-gaap_BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationLiability1 / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember
Summary of estimated fair values of the assets acquired and liabilities assumed |  |  |  |  |  |  |  |
Account receivable |  |  |  |  |  | 1,523,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsReceivables / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Inventory |  |  |  |  |  | 386,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Other current assets |  |  |  |  |  | 512,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Property, plant, and equipment |  |  |  |  |  | 1,917,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Intangible assets |  |  |  |  |  | 99,270,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Total identifiable assets acquired |  |  |  |  |  | 103,608,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Current liabilities |  |  |  |  |  | 4,370,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilities / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Estimated deferred tax liability, net |  |  |  |  |  | 32,426,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedDeferredTaxLiabilitiesNoncurrent / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Total liabilities assumed |  |  |  |  |  | 36,796,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Net identifiable assets acquired |  |  |  |  |  | 66,812,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Goodwill |  |  |  |  |  | 35,520,000us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Net assets acquired |  |  |  |  |  | 102,332,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  |  |  | 99,270,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Intangible assets acquired, amount |  |  |  |  |  | 99,270,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |
Asset impairment |  |  |  |  |  |  | 53,900,000us-gaap_AssetImpairmentCharges / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |
Acquisition related costs |  | 1,000,000us-gaap_BusinessCombinationAcquisitionRelatedCosts / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |  |
Pro forma consolidated statement of operations |  |  |  |  |  |  |  |
Revenue |  | 346,319,000us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember | 522,029,000us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |
Income (loss) from continuing operations before income taxes |  | (60,983,000)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember | 16,840,000us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember |  |  |  |  |
ALD | Technology |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  |  |  | 73,160,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = veco_CoreTechnologyMember |  |
Average useful life |  |  |  |  |  | 14 years |  |
ALD | Customer relationship |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  |  |  | 20,630,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |  |
Average useful life |  |  |  |  |  | 8 years |  |
ALD | Trademarks and tradenames |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  |  |  | 140,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |  |
Average useful life |  |  |  |  |  | 1 year |  |
ALD | Non-compete agreements |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  |  |  | 270,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_NoncompeteAgreementsMember |  |
Average useful life |  |  |  |  |  | 3 years |  |
ALD | IPR&D |  |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |  |
Finite lived intangible assets acquired, amount |  |  |  |  |  | $ 5,070,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = veco_SynosTechnologyIncMember / us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_InProcessResearchAndDevelopmentMember |  |

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