EX-21.1 3 a15-23356_1ex21d1.htm EX-21.1

Exhibit 21.1

Subsidiaries of the Registrant

Subsidiary |  | Jurisdiction of Organization |  | Percentage Ownership(A) |
U.S. Subsidiaries |  |  |  |  |
Veeco ALD Inc. |  | DE |  | 100 | %
Veeco APAC Inc. |  | DE |  | 100 | %
Veeco Precision Surface Processing LLC |  | DE |  | 100 | %
Veeco Process Equipment Inc. |  | DE |  | 100 | %
Veeco PSP Blocker A Corp. |  | DE |  | 100 | %
Veeco TK LLC |  | DE |  | 100 | %
Foreign Subsidiaries |  |  |  |  |
Veeco ALD Korea Ltd. |  | South Korea |  | 100 | %
Veeco Asia Pte. Ltd. |  | Singapore |  | 100 | %
Veeco Instruments GmbH |  | Germany |  | 100 | %
Veeco Instruments Limited |  | England |  | 100 | %
Veeco Instruments (Shanghai) Co. Ltd. |  | China |  | 100 | %
Veeco Korea LLC |  | South Korea |  | 100 | %
Veeco Malaysia Sdn. Bhd. |  | Malaysia |  | 100 | %
Veeco Netherlands BV |  | Netherlands |  | 100 | %
Veeco Taiwan Inc. |  | Taiwan |  | 100 | %

(A) Includes direct and indirect ownership.