<SEC-DOCUMENT>0001179110-16-023969-index.html : 20160506
<SEC-HEADER>0001179110-16-023969.hdr.sgml : 20160506
<ACCEPTANCE-DATETIME>20160506121440
ACCESSION NUMBER:		0001179110-16-023969
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160505
FILED AS OF DATE:		20160506
DATE AS OF CHANGE:		20160506

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			VEECO INSTRUMENTS INC
		CENTRAL INDEX KEY:			0000103145
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				112989601
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803
		BUSINESS PHONE:		516 677-0200

	MAIL ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	VACUUM ELECTRONIC MANUFACTURING CORP
		DATE OF NAME CHANGE:	19700408

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			St Dennis Thomas
		CENTRAL INDEX KEY:			0001339595

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-16244
		FILM NUMBER:		161626756

	MAIL ADDRESS:	
		STREET 1:		C/O FORMFACTOR, INC.
		STREET 2:		7005 SOUTHFRONT ROAD
		CITY:			LIVERMORE
		STATE:			CA
		ZIP:			94551
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>FORM 3 -
<TEXT>
Document 1 - file: edgar.html

Document 1 - RAW XML: edgar.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>ex24-tsd.txt
<TEXT>
Document 2 - file: ex24-tsd.txt

</DOCUMENT>
</SEC-DOCUMENT>