<SEC-DOCUMENT>0001104659-16-106704-index.html : 20160322
<SEC-HEADER>0001104659-16-106704.hdr.sgml : 20160322
<ACCEPTANCE-DATETIME>20160322060134
ACCESSION NUMBER:		0001104659-16-106704
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		6
CONFORMED PERIOD OF REPORT:	20160505
FILED AS OF DATE:		20160322
DATE AS OF CHANGE:		20160322
EFFECTIVENESS DATE:		20160322

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			VEECO INSTRUMENTS INC
		CENTRAL INDEX KEY:			0000103145
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				112989601
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-16244
		FILM NUMBER:		161519840

	BUSINESS ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803
		BUSINESS PHONE:		516 677-0200

	MAIL ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	VACUUM ELECTRONIC MANUFACTURING CORP
		DATE OF NAME CHANGE:	19700408
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>a16-2213_1def14a.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: a16-2213_1def14a.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g22131bii001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: g22131bii001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g22131bii002.gif
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g22131bii002.gif

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>g22131cei001.gif
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: g22131cei001.gif

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g22131cei002.gif
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: g22131cei002.gif

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g22131bci001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g22131bci001.jpg

</DOCUMENT>
</SEC-DOCUMENT>