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Subsequent Events (Details) |  | 1 Months Ended | 12 Months Ended |
--- | --- | --- | --- | ---
Feb. 01, 2017 $ / shares | Jan. 31, 2017 USD ($) $ / shares | Dec. 31, 2016 USD ($) | Feb. 02, 2017 $ / shares shares
Ultratech, Inc. | Implied Value Per Agreement |  |  |  |
Business Combinations |  |  |  |
Total transaction value |  |  | $ 815,000,000 |
Value of net assets acquired, net of cash balances |  |  | $ 550,000,000 |
Subsequent event | Ultratech, Inc. |  |  |  |
Business Combinations |  |  |  |
Cash to be received by acquiree (in dollars per share) | $ / shares |  |  |  | $ 21.75
Number of shares to be received by acquiree | shares |  |  |  | 0.2675
Transaction consideration (in dollars per share) | $ / shares | $ 28.64 |  |  |
Subsequent event | 2.70 Convertible Senior Notes due 2023 | Convertible debt |  |  |  |
Convertible Note |  |  |  |
Aggregate principal amount |  | $ 345,000,000 |  |
Interest rate (as a percent) |  | 2.70% |  |
Net proceeds from the offering |  | $ 336,000,000 |  |
Discount rate (as a percent) |  | 7.00% |  |
Conversion ratio |  | 24.9800 |  |
Common stock per principal amount |  | $ 1,000 |  |
Conversion price per share | $ / shares |  | $ 40.03 |  |

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