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Income (Loss) Per Share - Shares Excluded from EPS (Details) - shares
shares in Thousands
 12 Months Ended
Dec. 31, 2016
Dec. 31, 2015
Dec. 31, 2014
Income (Loss) Per Share      
Common share equivalents excluded from the diluted weighted average shares outstanding since Veeco incurred a net loss and their effect would be antidilutive 107 146 339
Unvested participating shares      
Income (Loss) Per Share      
Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses 312 1,017 1,141
Non-participating shares      
Income (Loss) Per Share      
Potentially dilutive non-participating shares excluded from the diluted calculation as their effect would be antidilutive 1,896 2,111 1,123