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Stock Plans - Options Exercised (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Stock Plans
Cash received from options exercised	$ 494	$ 2,233	$ 12,056
Intrinsic value of options exercised	$ 1,165	$ 2,089	$ 8,390

X

- Definition

Aggregate proceeds received by the entity during the annual period from exercises of stock or unit options and conversion of similar instruments granted under equity-based payment arrangements.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (j)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

+ Details

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Period Type:	duration

X

- Definition

Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (d)(2)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

+ Details

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Balance Type:	debit
Period Type:	duration

X

- Definition

It represents Information about Equity Compensation Plans and Equity

+ References

No definition available.

+ Details

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Namespace Prefix:	veco_
Data Type:	xbrli:stringItemType
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