<?xml version="1.0" encoding="us-ascii"?>
<!-- Created by Merrill Corporation -->
<!--XBRL document created with Merrill Bridge  7.2.100.0 -->
<!--Based on XBRL 2.1-->
<!--Created on: 8/3/2017 10:49:09 AM-->
<!--Modified on: 8/3/2017 10:49:09 AM-->
<xsd:schema targetNamespace="http://www.veeco.com/20170630" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:veco="http://www.veeco.com/20170630" xmlns:xl="http://www.xbrl.org/2003/XLink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:attributeFormDefault="unqualified" xmlns:invest="http://xbrl.sec.gov/invest/2013-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2011-01-31" xmlns:dei="http://xbrl.sec.gov/dei/2014-01-31" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:us-gaap="http://fasb.org/us-gaap/2016-01-31" xmlns:country="http://xbrl.sec.gov/country/2016-01-31" xmlns:negated="http://www.xbrl.org/2009/role/negated">
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheets" id="StatementConsolidatedBalanceSheets">
        <link:definition>00100 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" id="StatementConsolidatedStatementsOfOperations">
        <link:definition>00200 - Statement - Consolidated Statements of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss" id="StatementConsolidatedStatementsOfComprehensiveIncomeLoss">
        <link:definition>00300 - Statement - Consolidated Statements of Comprehensive Income (Loss)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" id="StatementConsolidatedStatementsOfCashFlows">
        <link:definition>00400 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeLossPerCommonShareDetails" id="DisclosureIncomeLossPerCommonShareDetails">
        <link:definition>40201 - Disclosure - Income (Loss) Per Common Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureBusinessCombinationsDetails" id="DisclosureBusinessCombinationsDetails">
        <link:definition>40301 - Disclosure - Business Combinations (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" id="DisclosureAssetsAvailableForSaleSecuritiesDetails">
        <link:definition>40402 - Disclosure - Assets - Available-For-Sale Securities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetailsCalc2" id="DisclosureAssetsAvailableForSaleSecuritiesDetailsCalc2">
        <link:definition>40402 - Disclosure - Assets - Available-For-Sale Securities (Details) - Calc 2</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsCurrentAssetsDetails" id="DisclosureAssetsCurrentAssetsDetails">
        <link:definition>40403 - Disclosure - Assets - Current Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" id="DisclosureAssetsPropertyPlantAndEquipmentDetails">
        <link:definition>40404 - Disclosure - Assets - Property, Plant, and Equipment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsGoodwillAndIntangibleAssetsDetails" id="DisclosureAssetsGoodwillAndIntangibleAssetsDetails">
        <link:definition>40405 - Disclosure - Assets - Goodwill and Intangible Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndWarrantyDetails" id="DisclosureLiabilitiesAccruedExpensesAndWarrantyDetails">
        <link:definition>40501 - Disclosure - Liabilities - Accrued Expenses and Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" id="DisclosureLiabilitiesConvertibleSeniorNotesDetails">
        <link:definition>40505 - Disclosure - Liabilities - Convertible Senior Notes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseRequirementsDetails" id="DisclosureCommitmentsAndContingenciesMinimumLeaseRequirementsDetails">
        <link:definition>40601 - Disclosure - Commitments and Contingencies - Minimum Lease Requirements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesDetails" id="DisclosureIncomeTaxesDetails">
        <link:definition>40901 - Disclosure - Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DocumentDocumentAndEntityInformation" id="DocumentDocumentAndEntityInformation">
        <link:definition>00090 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" id="StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>00105 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureBasisOfPresentation" id="DisclosureBasisOfPresentation">
        <link:definition>10101 - Disclosure - Basis of Presentation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeLossPerCommonShare" id="DisclosureIncomeLossPerCommonShare">
        <link:definition>10201 - Disclosure - Income (Loss) Per Common Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureBusinessCombinations" id="DisclosureBusinessCombinations">
        <link:definition>10301 - Disclosure - Business Combinations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssets" id="DisclosureAssets">
        <link:definition>10401 - Disclosure - Assets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilities" id="DisclosureLiabilities">
        <link:definition>10501 - Disclosure - Liabilities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingencies" id="DisclosureCommitmentsAndContingencies">
        <link:definition>10601 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureEquity" id="DisclosureEquity">
        <link:definition>10701 - Disclosure - Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureShareBasedCompensation" id="DisclosureShareBasedCompensation">
        <link:definition>10801 - Disclosure - Share-based compensation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxes" id="DisclosureIncomeTaxes">
        <link:definition>10901 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation" id="DisclosureSegmentReportingAndGeographicInformation">
        <link:definition>11001 - Disclosure - Segment Reporting and Geographic Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" id="DisclosureBasisOfPresentationPolicies">
        <link:definition>20102 - Disclosure - Basis of Presentation (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeLossPerCommonShareTables" id="DisclosureIncomeLossPerCommonShareTables">
        <link:definition>30203 - Disclosure - Income (Loss) Per Common Share (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureBusinessCombinationsTables" id="DisclosureBusinessCombinationsTables">
        <link:definition>30303 - Disclosure - Business Combinations (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsTables" id="DisclosureAssetsTables">
        <link:definition>30403 - Disclosure - Assets (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesTables" id="DisclosureLiabilitiesTables">
        <link:definition>30503 - Disclosure - Liabilities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables" id="DisclosureCommitmentsAndContingenciesTables">
        <link:definition>30603 - Disclosure - Commitments and Contingencies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureEquityTables" id="DisclosureEquityTables">
        <link:definition>30703 - Disclosure - Equity (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureShareBasedCompensationTables" id="DisclosureShareBasedCompensationTables">
        <link:definition>30803 - Disclosure - Share-based compensation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesTables" id="DisclosureIncomeTaxesTables">
        <link:definition>30903 - Disclosure - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables" id="DisclosureSegmentReportingAndGeographicInformationTables">
        <link:definition>31003 - Disclosure - Segment Reporting and Geographic Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureBasisOfPresentationDetails" id="DisclosureBasisOfPresentationDetails">
        <link:definition>40101 - Disclosure - Basis of Presentation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeLossPerCommonShareSharesExcludedFromEpsDetails" id="DisclosureIncomeLossPerCommonShareSharesExcludedFromEpsDetails">
        <link:definition>40202 - Disclosure - Income (Loss) Per Common Share - Shares Excluded from EPS (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsFairValueDetails" id="DisclosureAssetsFairValueDetails">
        <link:definition>40401 - Disclosure - Assets - Fair Value (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAssetsOtherAssetsDetails" id="DisclosureAssetsOtherAssetsDetails">
        <link:definition>40406 - Disclosure - Assets - Other Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesRestructuringAccrualsGeneralInformationDetails" id="DisclosureLiabilitiesRestructuringAccrualsGeneralInformationDetails">
        <link:definition>40502 - Disclosure - Liabilities - Restructuring accruals general information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesCustomerDepositsDetails" id="DisclosureLiabilitiesCustomerDepositsDetails">
        <link:definition>40503 - Disclosure - Liabilities - Customer Deposits (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesMortgagePayableDetails" id="DisclosureLiabilitiesMortgagePayableDetails">
        <link:definition>40504 - Disclosure - Liabilities - Mortgage Payable (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails" id="DisclosureLiabilitiesOtherLiabilitiesDetails">
        <link:definition>40506 - Disclosure - Liabilities - Other Liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesDetails" id="DisclosureCommitmentsAndContingenciesDetails">
        <link:definition>40602 - Disclosure - Commitments and Contingencies (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails" id="DisclosureEquityAociRollforwardDetails">
        <link:definition>40701 - Disclosure - Equity - AOCI Rollforward (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureShareBasedCompensationDetails" id="DisclosureShareBasedCompensationDetails">
        <link:definition>40801 - Disclosure - Share-based compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" id="DisclosureSegmentReportingAndGeographicInformationDetails">
        <link:definition>41001 - Disclosure - Segment Reporting and Geographic Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20170630_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20170630_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20170630_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20170630_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2014-01-31" schemaLocation="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <import namespace="http://fasb.org/us-gaap/2016-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd" xmlns="http://www.w3.org/2001/XMLSchema" />
  <import namespace="http://xbrl.sec.gov/country/2016-01-31" schemaLocation="http://xbrl.sec.gov/country/2016/country-2016-01-31.xsd" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_PercentageOfRetentionRevenue" name="PercentageOfRetentionRevenue" nillable="true" type="num:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <xsd:element name="DocumentAndEntityInformationAbstract" id="veco_DocumentAndEntityInformationAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="DeferredIncomeTaxNoncashExpenseBenefit" id="veco_DeferredIncomeTaxNoncashExpenseBenefit" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="duration" />
  <element id="veco_CommitmentsContingenciesAndOtherMattersDisclosureAbstract" name="CommitmentsContingenciesAndOtherMattersDisclosureAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <xsd:element name="CostMethodInvestmentsOwnershipPercentage" id="veco_CostMethodInvestmentsOwnershipPercentage" type="num:percentItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" />
  <xsd:element name="CommitmentsAndContingenciesConcentrationRiskLeasesOfLesseeEnvironmentalLossContingencyDisclosureTextBlock" id="veco_CommitmentsAndContingenciesConcentrationRiskLeasesOfLesseeEnvironmentalLossContingencyDisclosureTextBlock" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughTwoYearsFairValue" id="veco_AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughTwoYearsFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:balance="debit" xbrli:periodType="instant" />
  <element id="veco_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <xsd:element name="BusinessAcquisitionRevenueAndNetIncomeOfAcquireeSinceAcquisitionDateActualAbstract" id="veco_BusinessAcquisitionRevenueAndNetIncomeOfAcquireeSinceAcquisitionDateActualAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <element id="veco_AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughTwoYearsAmortizedCost" name="AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughTwoYearsAmortizedCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_RestrictedStockAwardMember" name="RestrictedStockAwardMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BalanceSheetRelatedAssetsDisclosuresAbstract" name="BalanceSheetRelatedAssetsDisclosuresAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BalanceSheetRelatedLiabilitiesDisclosuresAbstract" name="BalanceSheetRelatedLiabilitiesDisclosuresAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BalanceSheetRelatedLiabilitiesDisclosuresTextBlock" name="BalanceSheetRelatedLiabilitiesDisclosuresTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BalanceSheetRelatedAssetsDisclosuresTextBlock" name="BalanceSheetRelatedAssetsDisclosuresTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_FairValueAssetsTransferBetweenLevelsAmount" name="FairValueAssetsTransferBetweenLevelsAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_NumberOfSalesMarkets" name="NumberOfSalesMarkets" nillable="true" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" name="FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_LightingDisplayAndPowerElectronicsMember" name="LightingDisplayAndPowerElectronicsMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_AdvancedPackagingMemsAndRfMember" name="AdvancedPackagingMemsAndRfMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ScientificAndIndustrialMember" name="ScientificAndIndustrialMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_RestOfWorldMember" name="RestOfWorldMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock" name="PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" name="ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_AdditionalCostMethodInvestment" name="AdditionalCostMethodInvestment" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_NonParticipatingSharesMember" name="NonParticipatingSharesMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_NonvestedParticipatingSharesMember" name="NonvestedParticipatingSharesMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" name="SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareDueToLossIncurredAmount" name="AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareDueToLossIncurredAmount" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_RestrictedAndPerformanceSharesMember" name="RestrictedAndPerformanceSharesMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ScheduleOfShareBasedCompensationRestrictedStockAndPerformanceSharesActivityTableTextBlock" name="ScheduleOfShareBasedCompensationRestrictedStockAndPerformanceSharesActivityTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ScheduleOfBusinessAcquisitionConsiderationTransferredTableTextBlock" name="ScheduleOfBusinessAcquisitionConsiderationTransferredTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ScheduleOfBusinessAcquisitionRevenueAndNetIncomeOfAcquireeSinceAcquisitionDateTableTextBlock" name="ScheduleOfBusinessAcquisitionRevenueAndNetIncomeOfAcquireeSinceAcquisitionDateTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayableAndAccruedExpenses" name="BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayableAndAccruedExpenses" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessCombinationAccountsReceivableGrossContractualValue" name="BusinessCombinationAccountsReceivableGrossContractualValue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_AccruedInstallationChargesCurrent" name="AccruedInstallationChargesCurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ProductWarrantyAccrualConsumptionOfReserves" name="ProductWarrantyAccrualConsumptionOfReserves" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" name="FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" name="FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_AtomicLayerDepositionRestructuringPlanMember" name="AtomicLayerDepositionRestructuringPlanMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_StreamlineOperationsEnhanceEfficiencyAndReduceCostsMember" name="StreamlineOperationsEnhanceEfficiencyAndReduceCostsMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_RestructuringChargesProvision" name="RestructuringChargesProvision" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" name="DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_TransferFromInventories" name="TransferFromInventories" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_NonCashOperatingAndFinancingItemsAbstract" name="NonCashOperatingAndFinancingItemsAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessAcquisitionSharesReceivedForEachShareOfAcquiree" name="BusinessAcquisitionSharesReceivedForEachShareOfAcquiree" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ProceedsTaxWithholdingsFromStockOptionsExercisedAndEmployeeStockPurchasePlan" name="ProceedsTaxWithholdingsFromStockOptionsExercisedAndEmployeeStockPurchasePlan" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_CashInterestExpenseAbstract" name="CashInterestExpenseAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_NonCashInterestExpenseAbstract" name="NonCashInterestExpenseAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_DebtInstrumentConvertibleMaximumPercentageOfStockPriceTrigger" name="DebtInstrumentConvertibleMaximumPercentageOfStockPriceTrigger" nillable="true" type="num:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_DebtInstrumentConvertibleNumberOfThresholdTradingDays" name="DebtInstrumentConvertibleNumberOfThresholdTradingDays" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_IncomeTaxesTable" name="IncomeTaxesTable" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_IncomeTaxesLineItems" name="IncomeTaxesLineItems" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_DebtInstrumentConvertibleNumberOfConsecutiveBusinessDaysDuringAfterMeasurementPeriod" name="DebtInstrumentConvertibleNumberOfConsecutiveBusinessDaysDuringAfterMeasurementPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_DebtInstrumentConvertibleNumberOfConsecutiveTradingDaysDuringMeasurementPeriod" name="DebtInstrumentConvertibleNumberOfConsecutiveTradingDaysDuringMeasurementPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_FrontEndSemiconductorMember" name="FrontEndSemiconductorMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_CoreTechnologyMember" name="CoreTechnologyMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessCombinationConsiderationTransferredEquityIssuedToReplacementOfEquityAwards" name="BusinessCombinationConsiderationTransferredEquityIssuedToReplacementOfEquityAwards" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_UltratechMember" name="UltratechMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_DurationOfEachFiscalQuarter" name="DurationOfEachFiscalQuarter" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventoryAndDeferredCostOfSales" name="BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventoryAndDeferredCostOfSales" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesCustomerDepositsAndDeferredRevenue" name="BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesCustomerDepositsAndDeferredRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_BusinessCombinationAccruedLiabilities" name="BusinessCombinationAccruedLiabilities" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAssumedFromUltratech" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAssumedFromUltratech" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAssumedFromUltratechPeriodWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAssumedFromUltratechPeriodWeightedAverageGrantDateFairValue" nillable="true" type="num:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_InventoryFairValueStepUpRelatedToPurchaseAccounting" name="InventoryFairValueStepUpRelatedToPurchaseAccounting" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="veco_TransactionCostConvertibleEquityComponent" name="TransactionCostConvertibleEquityComponent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
</xsd:schema>
