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Equity - AOCI Rollforward (Details) - USD ($) $ in Thousands, shares in Millions | 3 Months Ended | 6 Months Ended
--- | --- | ---
Jun. 30, 2017 | Jun. 30, 2016 | Jun. 30, 2017 | Jun. 30, 2016
Changes in the balances of each component of AOCI |  |  |  |
Balance at the beginning of the period |  |  | $ 594,595 |
Other comprehensive income (loss) | $ 62 | $ (23) | (37) | $ 66
Balance at the end of the period | 869,485 |  | $ 869,485 |
Ultratech |  |  |  |
Changes in the balances of each component of AOCI |  |  |  |
Issuance of shares for merger consideration (in shares) |  |  | 7.4 |
Accumulated Other Comprehensive Income |  |  |  |
Changes in the balances of each component of AOCI |  |  |  |
Balance at the beginning of the period |  |  | $ 1,777 |
Other comprehensive income (loss) |  |  | (37) |
Balance at the end of the period | 1,740 |  | 1,740 |
Foreign Currency Translation |  |  |  |
Changes in the balances of each component of AOCI |  |  |  |
Balance at the beginning of the period |  |  | 1,797 |
Other comprehensive income (loss) |  |  | 24 |
Balance at the end of the period | 1,821 |  | 1,821 |
Unrealized Gains (Losses) on Available for Sale Securities |  |  |  |
Changes in the balances of each component of AOCI |  |  |  |
Balance at the beginning of the period |  |  | (20) |
Other comprehensive income (loss) |  |  | (61) |
Balance at the end of the period | $ (81) |  | (81) |
Additional Paid-in Capital |  |  |  |
Changes in the balances of each component of AOCI |  |  |  |
Issuance of shares for merger consideration |  |  | 233,800 |
Convertible senior notes including deferred tax impact |  |  | 49,300 |
Convertible senior notes related to on-going share-based compensation |  |  | $ 6,700 |

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- Definition Amount of increase (decrease) in additional paid in capital (APIC) resulting from recognition of deferred taxes for convertible debt with a beneficial conversion feature. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 55 -Paragraph 51 -URI http://asc.fasb.org/extlink&oid=75116239&loc=d3e34017-109320 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Beneficial Conversion Feature -URI http://asc.fasb.org/extlink&oid=6505963 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 505 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6928386&loc=d3e21463-112644 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 505 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.3-04) -URI http://asc.fasb.org/extlink&oid=27012166&loc=d3e187085-122770 + Details
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