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Liabilities - Restructuring accruals general information (Details) $ in Thousands | 3 Months Ended | 6 Months Ended
--- | --- | ---
Sep. 30, 2016 employee | Jun. 30, 2017 USD ($) | Sep. 30, 2016 employee | Jun. 30, 2016 USD ($)
Restructuring accruals rollforward |  |  |  |
Balance at the beginning of the period |  | $ 1,796 |  |
Provision |  | 3,754 |  |
Payments |  | (4,177) |  |
Balance at the end of the period |  | 1,373 |  |
Non-cash charges related to share based compensation |  | 13,806 |  | $ 8,390
Restructuring |  |  |  |
Restructuring accruals rollforward |  |  |  |
Non-cash charges related to share based compensation |  | 800 |  |
Minimum |  |  |  |
Restructuring accruals |  |  |  |
Additional restructuring costs expected over the next few quarters |  | 1,000 |  |
Maximum |  |  |  |
Restructuring accruals |  |  |  |
Additional restructuring costs expected over the next few quarters |  | 3,000 |  |
Atomic layer deposition restructuring plan |  |  |  |
Restructuring accruals |  |  |  |
Number of employees terminated | employee | 25 |  |  |
Personnel Severance and Related Costs |  |  |  |
Restructuring accruals rollforward |  |  |  |
Balance at the beginning of the period |  | 1,796 |  |
Provision |  | 1,405 |  |
Payments |  | (2,079) |  |
Balance at the end of the period |  | 1,122 |  |
Personnel Severance and Related Costs | Streamline operations, enhance efficiency and reduce costs |  |  |  |
Restructuring accruals |  |  |  |
Number of employees terminated | employee |  |  | 50 |
Facility Closing Costs |  |  |  |
Restructuring accruals rollforward |  |  |  |
Provision |  | 2,349 |  |
Payments |  | (2,098) |  |
Balance at the end of the period |  | $ 251 |  |

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- Definition Amount of cash payments made as the result of exit or disposal activities. Excludes payments associated with a discontinued operation or an asset retirement obligation. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (b)(2) -URI http://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 25 -URI http://asc.fasb.org/extlink&oid=66902209&loc=d3e3536-108585 + Details
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- Definition Amount of expected cost remaining for the specified restructuring cost. + References No definition available. + Details
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- Definition The number of positions eliminated during the period as a result of restructuring activities. + References No definition available. + Details
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- Definition Carrying amount (including both current and noncurrent portions of the accrual) as of the balance sheet date pertaining to a specified type of cost associated with exit from or disposal of business activities or restructuring pursuant to a duly authorized plan. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SAB TOPIC 5.P.4(b)) -URI http://asc.fasb.org/extlink&oid=27011515&loc=d3e140904-122747 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (b)(2) -URI http://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869 + Details
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- Definition The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=66902209&loc=d3e3602-108585 + Details
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