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Business Combinations (Details) - USD ($) $ / shares in Units, $ in Thousands |  | 1 Months Ended | 3 Months Ended | 6 Months Ended |
--- | --- | --- | --- | --- | ---
May 26, 2017 | Jun. 30, 2017 | Jun. 30, 2017 | Jun. 30, 2016 | Jun. 30, 2017 | Jun. 30, 2016 | Dec. 31, 2016
Summary of estimated fair values of the assets acquired and liabilities assumed |  |  |  |  |  |  |
Goodwill |  | $ 303,160 | $ 303,160 |  | $ 303,160 |  | $ 114,908
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Acquisition related costs |  |  | 14,133 |  | 15,494 |  |
Non-cash charges related to share based compensation |  |  |  |  | 13,806 | $ 8,390 |
Revenue and income (loss) from continuing operations before income taxes |  |  |  |  |  |  |
Amortization expense on intangible assets |  |  | 6,354 | $ 5,273 | 9,221 | 10,524 |
Restructuring charges |  |  | 3,257 | 2,095 | 4,595 | 2,195 |
Ultratech |  |  |  |  |  |  |
Business Combinations |  |  |  |  |  |  |
Cash received by acquiree (in dollars per share) | $ 21.75 |  |  |  |  |  |
Number of shares received by acquiree | 0.2675 |  |  |  |  |  |
Fair value of the consideration transferred |  |  |  |  |  |  |
Amount paid, net of cash acquired | $ 399,478 |  |  |  |  |  |
Fair value of equity issuances (7.4 million shares issued) | $ 233,655 |  |  |  |  |  |
Number of shares in fair value of equity issuances (in shares) | 7,400,000 |  |  |  |  |  |
Replacement equity awards attributable to pre-acquisition service | $ 228 |  |  |  |  |  |
Acquisition date fair value | 633,361 |  |  |  |  |  |
Summary of estimated fair values of the assets acquired and liabilities assumed |  |  |  |  |  |  |
Short-term investments | 47,161 |  |  |  |  |  |
Account receivable | 45,465 |  |  |  |  |  |
Inventory and deferred cost of sales | 61,680 |  |  |  |  |  |
Prepaid expense and other current assets | 7,217 |  |  |  |  |  |
Property, plant, and equipment | 19,555 |  |  |  |  |  |
Intangible assets | 346,940 |  |  |  |  |  |
Other assets | 6,442 |  |  |  |  |  |
Total identifiable assets acquired | 534,460 |  |  |  |  |  |
Accounts payable and accrued expenses | 40,087 |  |  |  |  |  |
Customer deposits and deferred revenue | 4,834 |  |  |  |  |  |
Deferred income taxes | 32,478 |  |  |  |  |  |
Other liabilities | 11,952 |  |  |  |  |  |
Total liabilities assumed | 89,351 |  |  |  |  |  |
Net identifiable assets acquired | 445,109 |  |  |  |  |  |
Goodwill | 188,252 |  |  |  |  |  |
Net assets acquired | 633,361 |  |  |  |  |  |
Gross contractual value of accounts receivable | 46,000 |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Intangible assets acquired, amount | 346,940 |  |  |  |  |  |
Acquisition related costs |  |  | 14,100 |  | 15,500 |  |
Non-cash charges related to share based compensation |  |  | 4,200 |  |  |  |
Revenue and income (loss) from continuing operations before income taxes |  |  |  |  |  |  |
Revenue |  | 24,050 |  |  |  |  |
Loss from operations before income taxes |  | $ (21,445) |  |  |  |  |
Inventory fair value step-up related to purchase accounting |  |  |  |  | 7,400 |  |
Amortization expense on intangible assets |  |  |  |  | 3,500 |  |
Restructuring charges |  |  |  |  | 1,200 |  |
Pro forma consolidated statement of operations |  |  |  |  |  |  |
Revenue |  |  | 128,399 | 124,272 | 280,194 | 247,493 |
Loss from operations before income taxes |  |  | $ (28,898) | $ (54,380) | $ (32,852) | $ (128,860) |
Diluted earnings per share (in dollars per share) |  |  | $ (0.61) | $ (1.17) | $ (0.70) | $ (2.78) |
Ultratech | Technology |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Intangible assets acquired, amount | $ 158,390 |  |  |  |  |  |
Useful life | 9 years |  |  |  |  |  |
Ultratech | Customer relationships |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Intangible assets acquired, amount | $ 116,710 |  |  |  |  |  |
Useful life | 12 years |  |  |  |  |  |
Ultratech | Backlog |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Intangible assets acquired, amount | $ 3,080 |  |  |  |  |  |
Useful life | 6 months |  |  |  |  |  |
Ultratech | In-process research and development |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Intangible assets acquired, amount | $ 43,340 |  |  |  |  |  |
Ultratech | Trademark and tradenames |  |  |  |  |  |  |
Intangible assets acquired and the estimated weighted-average useful life |  |  |  |  |  |  |
Intangible assets acquired, amount | $ 25,420 |  |  |  |  |  |
Useful life | 7 years |  |  |  |  |  |

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- Definition Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (a)(3) -URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275 + Details
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- Definition Number of shares of equity interests issued or issuable to acquire entity. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(4) -URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479 + Details
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- Definition The pro forma diluted net income per share for a period as if the business combination or combinations had been completed at the beginning of a period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(2)-(3) -URI http://asc.fasb.org/extlink&oid=65885119&loc=d3e1392-128463 + Details
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- Definition The pro forma net Income or Loss for the period as if the business combination or combinations had been completed at the beginning of a period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(2)-(3) -URI http://asc.fasb.org/extlink&oid=65885119&loc=d3e1392-128463 + Details
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- Definition This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 25 -Paragraph 23 -URI http://asc.fasb.org/extlink&oid=73531572&loc=d3e1043-128460 + Details
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- Definition Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 7 -URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6578-128477 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 8 -URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6613-128477 + Details
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- Definition Amount of equity interests of the acquirer, including instruments or interests issued or issuable in consideration for the business combination. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 7 -URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6578-128477 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 8 -URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6613-128477 + Details
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- Definition This element represents the amount of earnings or loss of the acquiree since the acquisition date included in the consolidated income statement for the reporting period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1) -URI http://asc.fasb.org/extlink&oid=65885119&loc=d3e1392-128463 + Details
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- Definition This element represents the amount of revenue of the acquiree since the acquisition date included in the consolidated income statement for the reporting period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1) -URI http://asc.fasb.org/extlink&oid=65885119&loc=d3e1392-128463 + Details
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- Definition Amount of assets acquired at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount of investments in debt and equity securities, including, but not limited to, held-to-maturity, trading and available-for-sale expected to be converted to cash, sold or exchanged within one year or the normal operating cycle, if longer, acquired at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer, acquired at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount due from customers or clients for goods or services, including trade receivables, that have been delivered or sold in the normal course of business, and amounts due from others, including related parties expected to be converted to cash, sold or exchanged within one year or the normal operating cycle, if longer, acquired at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount of other liabilities due within one year or within the normal operating cycle, if longer, assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount of deferred tax liability attributable to taxable temporary difference assumed at the acquisition date that are classified as noncurrent. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount of intangible assets, excluding goodwill, acquired at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition The amount of identifiable intangible assets recognized as of the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 55 -Paragraph 37 -URI http://asc.fasb.org/extlink&oid=73531372&loc=d3e2207-128464 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition Amount recognized as of the acquisition date for the identifiable assets acquired in excess of (less than) the aggregate liabilities assumed. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 55 -Paragraph 37 -URI http://asc.fasb.org/extlink&oid=73531372&loc=d3e2207-128464 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=73530397&loc=d3e4845-128472 + Details
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- Definition The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=66902209&loc=d3e3213-108585 + Details
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- Definition Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SAB Topic 5.P.3) -URI http://asc.fasb.org/extlink&oid=27011515&loc=d3e140864-122747 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=66902209&loc=d3e3602-108585 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SAB Topic 5.P.4(b)) -URI http://asc.fasb.org/extlink&oid=27011515&loc=d3e140904-122747 + Details
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- Definition The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=66902209&loc=d3e3602-108585 + Details
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- Definition Amount equity issued for the replacement of equity awards attributable to pre-acquisition service. + References No definition available. + Details
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- Definition Amount of liabilities incurred for goods and services received that are used in an entity's business and related party payables and accrued expenses, assumed at the acquisition date. + References No definition available. + Details
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- Definition Represents the current customer deposits and deferred revenue assumed at the acquisition date. + References No definition available. + Details
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