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Liabilities (Tables)

6 Months Ended

Jun. 30, 2017

Liabilities

Schedule of accrued expenses and other current liabilities

		June 30,			December 31,
		2017			2016
		(in thousands)
Payroll and related benefits		$	23,016		$	18,780
Warranty		6,741			4,217
Professional fees		2,943			1,827
Installation		1,386			1,382
Sales, use, and other taxes		1,806			1,282
Restructuring liability		1,373			1,796
Interest		4,244			—
Other		2,796			3,917
Total		$	44,305		$	33,201

Schedule of changes in product warranty reserves

		(in thousands)
Balance - December 31, 2016		$	4,217
Warranties issued		2,809
Addition from Ultratech acquisition		1,889
Consumption of reserves		(2,673		)
Changes in estimate		499
Balance - June 30, 2017		$	6,741

Schedule of restructuring accrual activities

		Personnel
		Severance and			Facility
		Related Costs			Closing Costs			Total
		(in thousands)
Balance - December 31, 2016		$	1,796		$	—		$	1,796
Provision		1,405			2,349			3,754
Payments		(2,079		)	(2,098		)	(4,177		)
Balance - June 30, 2017		$	1,122		$	251		$	1,373

Schedule of carrying value of Convertible Senior Notes

		June 30,
		2017
		(in thousands)
Principal amount		$	345,000
Unamortized debt discount		(68,072		)
Unamortized transaction costs		(6,857		)
Net carrying value		$	270,071

Summary of interest expense related to Convertible Senior Notes

		Three months ended June 30,			Six months ended June 30,
		2017			2017
		(in thousands)
Cash Interest Expense
Coupon interest expense		$	2,329		$	4,244
Non-Cash Interest Expense
Amortization of debt discount		2,455			4,440
Amortization of transaction costs		247			447
Total Interest Expense		$	5,031		$	9,131

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