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Business Combinations (Details) - USD ($)
$ / shares in Units, $ in Thousands
 1 Months Ended 3 Months Ended 6 Months Ended
May 26, 2017
Jun. 30, 2017
Jun. 30, 2017
Jun. 30, 2016
Jun. 30, 2017
Jun. 30, 2016
Dec. 31, 2016
Summary of estimated fair values of the assets acquired and liabilities assumed              
Goodwill   $ 303,160 $ 303,160   $ 303,160   $ 114,908
Intangible assets acquired and the estimated weighted-average useful life              
Acquisition related costs     14,133   15,494    
Non-cash charges related to share based compensation         13,806 $ 8,390  
Revenue and income (loss) from continuing operations before income taxes              
Amortization expense on intangible assets     6,354 $ 5,273 9,221 10,524  
Restructuring charges     3,257 2,095 4,595 2,195  
Ultratech              
Business Combinations              
Cash received by acquiree (in dollars per share) $ 21.75            
Number of shares received by acquiree 0.2675            
Fair value of the consideration transferred              
Amount paid, net of cash acquired $ 399,478            
Fair value of equity issuances (7.4 million shares issued) $ 233,655            
Number of shares in fair value of equity issuances (in shares) 7,400,000            
Replacement equity awards attributable to pre-acquisition service $ 228            
Acquisition date fair value 633,361            
Summary of estimated fair values of the assets acquired and liabilities assumed              
Short-term investments 47,161            
Account receivable 45,465            
Inventory and deferred cost of sales 61,680            
Prepaid expense and other current assets 7,217            
Property, plant, and equipment 19,555            
Intangible assets 346,940            
Other assets 6,442            
Total identifiable assets acquired 534,460            
Accounts payable and accrued expenses 40,087            
Customer deposits and deferred revenue 4,834            
Deferred income taxes 32,478            
Other liabilities 11,952            
Total liabilities assumed 89,351            
Net identifiable assets acquired 445,109            
Goodwill 188,252            
Net assets acquired 633,361            
Gross contractual value of accounts receivable 46,000            
Intangible assets acquired and the estimated weighted-average useful life              
Intangible assets acquired, amount 346,940            
Acquisition related costs     14,100   15,500    
Non-cash charges related to share based compensation     4,200        
Revenue and income (loss) from continuing operations before income taxes              
Revenue   24,050          
Loss from operations before income taxes   $ (21,445)          
Inventory fair value step-up related to purchase accounting         7,400    
Amortization expense on intangible assets         3,500    
Restructuring charges         1,200    
Pro forma consolidated statement of operations              
Revenue     128,399 124,272 280,194 247,493  
Loss from operations before income taxes     $ (28,898) $ (54,380) $ (32,852) $ (128,860)  
Diluted earnings per share (in dollars per share)     $ (0.61) $ (1.17) $ (0.70) $ (2.78)  
Ultratech | Technology              
Intangible assets acquired and the estimated weighted-average useful life              
Intangible assets acquired, amount $ 158,390            
Useful life 9 years            
Ultratech | Customer relationships              
Intangible assets acquired and the estimated weighted-average useful life              
Intangible assets acquired, amount $ 116,710            
Useful life 12 years            
Ultratech | Backlog              
Intangible assets acquired and the estimated weighted-average useful life              
Intangible assets acquired, amount $ 3,080            
Useful life 6 months            
Ultratech | In-process research and development              
Intangible assets acquired and the estimated weighted-average useful life              
Intangible assets acquired, amount $ 43,340            
Ultratech | Trademark and tradenames              
Intangible assets acquired and the estimated weighted-average useful life              
Intangible assets acquired, amount $ 25,420            
Useful life 7 years