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Liabilities - Restructuring accruals general information (Details)
$ in Thousands
 3 Months Ended 6 Months Ended
Sep. 30, 2016
employee
Jun. 30, 2017
USD ($)
Sep. 30, 2016
employee
Jun. 30, 2016
USD ($)
Restructuring accruals rollforward        
Balance at the beginning of the period   $ 1,796    
Provision   3,754    
Payments   (4,177)    
Balance at the end of the period   1,373    
Non-cash charges related to share based compensation   13,806   $ 8,390
Restructuring        
Restructuring accruals rollforward        
Non-cash charges related to share based compensation   800    
Minimum        
Restructuring accruals        
Additional restructuring costs expected over the next few quarters   1,000    
Maximum        
Restructuring accruals        
Additional restructuring costs expected over the next few quarters   3,000    
Atomic layer deposition restructuring plan        
Restructuring accruals        
Number of employees terminated | employee 25      
Personnel Severance and Related Costs        
Restructuring accruals rollforward        
Balance at the beginning of the period   1,796    
Provision   1,405    
Payments   (2,079)    
Balance at the end of the period   1,122    
Personnel Severance and Related Costs | Streamline operations, enhance efficiency and reduce costs        
Restructuring accruals        
Number of employees terminated | employee     50  
Facility Closing Costs        
Restructuring accruals rollforward        
Provision   2,349    
Payments   (2,098)    
Balance at the end of the period   $ 251