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Equity - AOCI Rollforward (Details) - USD ($)
$ in Thousands, shares in Millions
3 Months Ended 6 Months Ended
Jun. 30, 2017
Jun. 30, 2016
Jun. 30, 2017
Jun. 30, 2016
Changes in the balances of each component of AOCI        
Balance at the beginning of the period     $ 594,595  
Other comprehensive income (loss) $ 62 $ (23) (37) $ 66
Balance at the end of the period 869,485   $ 869,485  
Ultratech        
Changes in the balances of each component of AOCI        
Issuance of shares for merger consideration (in shares)     7.4  
Accumulated Other Comprehensive Income        
Changes in the balances of each component of AOCI        
Balance at the beginning of the period     $ 1,777  
Other comprehensive income (loss)     (37)  
Balance at the end of the period 1,740   1,740  
Foreign Currency Translation        
Changes in the balances of each component of AOCI        
Balance at the beginning of the period     1,797  
Other comprehensive income (loss)     24  
Balance at the end of the period 1,821   1,821  
Unrealized Gains (Losses) on Available for Sale Securities        
Changes in the balances of each component of AOCI        
Balance at the beginning of the period     (20)  
Other comprehensive income (loss)     (61)  
Balance at the end of the period $ (81)   (81)  
Additional Paid-in Capital        
Changes in the balances of each component of AOCI        
Issuance of shares for merger consideration     233,800  
Convertible senior notes including deferred tax impact     49,300  
Convertible senior notes related to on-going share-based compensation     $ 6,700