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Share-based compensation (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Share-based compensation
Total	$ 9,620	$ 4,002	$ 13,806	$ 8,390
Cost of sales
Share-based compensation
Total	500	486	1,157	1,032
Research and development
Share-based compensation
Total	708	940	1,137	2,039
Selling, general, and administrative
Share-based compensation
Total	3,368	$ 2,576	6,468	$ 5,319
Restructuring
Share-based compensation
Total	841		841
Acquisition costs
Share-based compensation
Total	$ 4,203		$ 4,203
Restricted Stock Awards | Minimum
Share-based compensation
Expiration term			1 year
Restricted Stock Awards | Maximum
Share-based compensation
Expiration term			5 years
Stock option Awards
Number of Shares
Outstanding at the beginning of the period (in shares)			1,576
Exercised (in shares)			(18)
Expired or forfeited (in shares)			(120)
Outstanding at the end of the period (in shares)	1,438		1,438
Weighted Average Exercise Price
Outstanding at the beginning of the period (in dollars per share)			$ 35.18
Exercised (in dollars per share)			30.03
Expired or forfeited (in dollars per share)			37.14
Outstanding at the end of the period (in dollars per share)	$ 35.08		$ 35.08
Restricted shares and performance shares
Number of Shares
Outstanding at the beginning of the period (in shares)			1,949
Granted (in shares)			649
Assumed from Ultratech (in shares)			338
Vested (in shares)			(549)
Forfeited (in shares)			(130)
Outstanding at the end of the period (in shares)	2,257		2,257
Weighted Average Grant Date Fair Value
Outstanding at the beginning of the period (in dollars per share)			$ 23.85
Granted (in dollars per share)			29.67
Assumed from Ultratech (in dollars per share)			31.75
Vested (in dollars per share)			25.98
Forfeited (in dollars per share)			25.95
Outstanding at the end of the period (in dollars per share)	$ 25.94		$ 25.94

X

- Definition

Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.

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The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.

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Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.

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The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.

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The weighted average fair value of nonvested awards on equity-based plans excluding option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, revenue or profit achievement stock award plan) for which the employer is contingently obligated to issue equity instruments or transfer assets to an employee who has not yet satisfied service or performance criteria necessary to gain title to proceeds from the sale of the award or underlying shares or units.

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The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.

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The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.

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- Definition

For presentations that combine terminations, the number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan or that expired.

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Weighted average price of options that were either forfeited or expired.

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Number of options outstanding, including both vested and non-vested options.

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Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.

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Weighted average price at which option holders acquired shares when converting their stock options into shares.

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Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

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Number of share options (or share units) exercised during the current period.

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The weighted average fair value at Share Assumed from Ultratech date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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